ma-D 530 - 534e Developer

Mary Tang mtang at stanford.edu
Thu Sep 10 17:45:38 PDT 2009


Hi Linda --

This should be fine to use.  When the bottle arrives, please contact 
Mahnaz, Ed, or me for a yellow label and barcode -- you'll also need to 
log the chemical in the logbook.  It can be stored in the personal 
chemicals area of the flammable cabinets in the lab.

Thanks,

Mary

Linda Ohara wrote:
> 1. Linda Ohara
>     lindaohara
>     408-772-8813
>     lindaohara at snf.stanford.edu <mailto:lindaohara at snf.stanford.edu>
>     ASML
>  
> 2. ma -D530 534 Developer  
>    
> MSDS is attached
>
> /*micro resist technology */*GmbHKöpenicker Str. 325, Haus 211*
>
> *12555 Berlin*
>
> *Germany*
>
> *Tel.: +49 - 30 - 6576 2192 Fax: +49 - 30 - 6576 2193*
>
> *3.  *We'll be developing 3" wafers coated with ma-N1410 resist by the 
> same manufacturer for the customer after ASML expose. We'll be using 
> the Headway Wet Bench.
>
> 4. 1 pint of liquid and we'll be storing it in the L cabinet.
>
>  
>
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-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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