Handbook of Silicon Wafer Cleaning Technology

Mary Tang mtang at stanford.edu
Tue Apr 13 12:49:27 PDT 2010


Hi all --

I was going to go to the library to get this book, but then realized I'd 
misplaced my ID so wouldn't be able to check it out.  But it turns out 
that this is available online at Stanford's ScienceDirect.  It's Kern's 
complete book, last updated in 2008.  I thought it might be useful for 
us to take a look at this, given our directive to review our 
contamination policies....

http://www.sciencedirect.com/science?_ob=RefWorkIndexURL&_idxType=TC&_cdi=45075&_refWorkId=5072&_explode=220986000002&_alpha=&_acct=C000012078&_version=1&_userid=145269&md5=89750402f2ae2138e4decd94355a7c9d&refID=220986000002#220986000002

It's a long link -- but you can get to it by searching the title on 
Socrates and following the links to "Availability."

M

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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