[Fwd: processes on Cytop]

Mary Tang mtang at stanford.edu
Wed Aug 4 12:26:07 PDT 2010


Hi all  --

More processing details.  The Cytop is a fluorinated polymer with good 
coating/adhesion properties (interesting, isn't it?)  The dispersing 
solvent is also a fluorinated polymer.  Shifeng proposes to spin coat 
this on the headway2.  Any concerns?

Mary




-------- Original Message --------
Subject: 	processes on Cytop
Date: 	Wed, 4 Aug 2010 11:56:54 -0700
From: 	Li, Shifeng <Shifeng.Li at lifetech.com>
To: 	'mtang at stanford.edu' <'mtang at stanford.edu'>
CC: 	James W. Conway <jwc at snf.stanford.edu>, Hennessy, Kevin 
<Kevin.Hennessy at lifetech.com>



Hi, Mary,

This is  what I am going to do with Cytop

 

1. Spin coat Cytop on the substrates and bake on the hotplates

 

2.  Surface actuation  in DryteK1 or Drytek2

 

3. Spin coating e-beam resist and pattern it

 

4.  metalization and lift off

 

5. O2 plasma dry etching in Drytek1 or DryteK2

 

I consider this process is a gold contanmiated process

 

if you have any questions, please let me know.

 

Best

Shifeng


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

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