[Fwd: processes on Cytop]

Mary Tang mtang at stanford.edu
Wed Aug 4 12:26:07 PDT 2010

Hi all  --

More processing details.  The Cytop is a fluorinated polymer with good 
coating/adhesion properties (interesting, isn't it?)  The dispersing 
solvent is also a fluorinated polymer.  Shifeng proposes to spin coat 
this on the headway2.  Any concerns?


-------- Original Message --------
Subject: 	processes on Cytop
Date: 	Wed, 4 Aug 2010 11:56:54 -0700
From: 	Li, Shifeng <Shifeng.Li at lifetech.com>
To: 	'mtang at stanford.edu' <'mtang at stanford.edu'>
CC: 	James W. Conway <jwc at snf.stanford.edu>, Hennessy, Kevin 
<Kevin.Hennessy at lifetech.com>

Hi, Mary,

This is  what I am going to do with Cytop


1. Spin coat Cytop on the substrates and bake on the hotplates


2.  Surface actuation  in DryteK1 or Drytek2


3. Spin coating e-beam resist and pattern it


4.  metalization and lift off


5. O2 plasma dry etching in Drytek1 or DryteK2


I consider this process is a gold contanmiated process


if you have any questions, please let me know.




Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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