Hydrobromic Acid at Wetbench General

J. Jason Lin jasonlin at stanford.edu
Thu Aug 5 15:49:43 PDT 2010


Hi SpecMat Committee,

I would like to use hydrobromic acid 48% (MSDS sheet is attached) at the
wbgeneral wetbench.

My plan is to dip my wafers in HBr acid for a few minutes at room
temperature, then transfer them to the savannah ald.  I would be using my
own labware.  Also, my wafers/pieces will only have Si, Ge, and SiO2 (no
metals to react with the acid).

Please let me know if you require more information to make a decision on my
specmat request.

Thanks,
Jason
CORAL ID: jasonlin
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