[Fwd: processes on Cytop]

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Aug 11 10:45:55 PDT 2010


Hi all,

Mario is out today but Jim has been on top of this and working on the 
system.
mahnaz

Mary Tang wrote:
> Hi again --
>
> OK, OK, I'VE got concerns.  The fluorinated polymer solvent strikes me 
> as being a very good way to cause adhesion problems if it should get 
> out of control.  This is why we do not allow non-mixed PDMS onto the 
> headway (the base is a silicon oil.)
>
> So, I propose that Shifeng does this bit of his process in the 
> wafersaw room, on the Laurell coater that we acquired specifically for 
> this purpose.  I understand that it still needs power and a pump 
> installed and that there is a damaged solenoid, but we've got a 
> replacement.  We've also got a programmable hotplate in that area, so 
> he can set his polymer before bringing his wafers back into the lab 
> for additional processing.  Shifeng says that for his experiments, 
> this should be fine.
>
> Is everyone else OK with this?  If we have an estimated time for the 
> laurell, I'd like to get back to him.
>
> Thanks all --
>
> Mary
>
> Mary Tang wrote:
>> Hi all  --
>>
>> More processing details.  The Cytop is a fluorinated polymer with 
>> good coating/adhesion properties (interesting, isn't it?)  The 
>> dispersing solvent is also a fluorinated polymer.  Shifeng proposes 
>> to spin coat this on the headway2.  Any concerns?
>>
>> Mary
>>
>>
>>
>>
>> -------- Original Message --------
>> Subject: 	processes on Cytop
>> Date: 	Wed, 4 Aug 2010 11:56:54 -0700
>> From: 	Li, Shifeng <Shifeng.Li at lifetech.com>
>> To: 	'mtang at stanford.edu' <'mtang at stanford.edu'>
>> CC: 	James W. Conway <jwc at snf.stanford.edu>, Hennessy, Kevin 
>> <Kevin.Hennessy at lifetech.com>
>>
>>
>>
>> Hi, Mary,
>>
>> This is  what I am going to do with Cytop
>>
>>  
>>
>> 1. Spin coat Cytop on the substrates and bake on the hotplates
>>
>>  
>>
>> 2.  Surface actuation  in DryteK1 or Drytek2
>>
>>  
>>
>> 3. Spin coating e-beam resist and pattern it
>>
>>  
>>
>> 4.  metalization and lift off
>>
>>  
>>
>> 5. O2 plasma dry etching in Drytek1 or DryteK2
>>
>>  
>>
>> I consider this process is a gold contanmiated process
>>
>>  
>>
>> if you have any questions, please let me know.
>>
>>  
>>
>> Best
>>
>> Shifeng
>>
>>
>> -- 
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA  94305
>> (650)723-9980
>> mtang at stanford.edu
>> http://snf.stanford.edu
>>   
>
>
> -- 
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu
>   



More information about the specmat mailing list