[Fwd: processes on Cytop]
edmyers at stanford.edu
Wed Aug 11 13:55:00 PDT 2010
I'm OK with the wafer saw room.
At 09:05 AM 8/11/2010, Mary Tang wrote:
>Hi again --
>OK, OK, I'VE got concerns. The fluorinated polymer solvent strikes
>me as being a very good way to cause adhesion problems if it should
>get out of control. This is why we do not allow non-mixed PDMS onto
>the headway (the base is a silicon oil.)
>So, I propose that Shifeng does this bit of his process in the
>wafersaw room, on the Laurell coater that we acquired specifically
>for this purpose. I understand that it still needs power and a pump
>installed and that there is a damaged solenoid, but we've got a
>replacement. We've also got a programmable hotplate in that area,
>so he can set his polymer before bringing his wafers back into the
>lab for additional processing. Shifeng says that for his
>experiments, this should be fine.
>Is everyone else OK with this? If we have an estimated time for the
>laurell, I'd like to get back to him.
>Thanks all --
>Mary Tang wrote:
>>Hi all --
>>More processing details. The Cytop is a fluorinated polymer with
>>good coating/adhesion properties (interesting, isn't it?) The
>>dispersing solvent is also a fluorinated polymer. Shifeng proposes
>>to spin coat this on the headway2. Any concerns?
>>-------- Original Message --------
>>Subject: processes on Cytop
>>Date: Wed, 4 Aug 2010 11:56:54 -0700
>>From: Li, Shifeng <mailto:Shifeng.Li at lifetech.com><Shifeng.Li at lifetech.com>
>>To: '<mailto:mtang at stanford.edu>mtang at stanford.edu'
>><mailto:%27mtang at stanford.edu%27><'mtang at stanford.edu'>
>>CC: James W. Conway
>><mailto:jwc at snf.stanford.edu><jwc at snf.stanford.edu>, Hennessy,
>>Kevin <mailto:Kevin.Hennessy at lifetech.com><Kevin.Hennessy at lifetech.com>
>>This is what I am going to do with Cytop
>>1. Spin coat Cytop on the substrates and bake on the hotplates
>>2. Surface actuation in DryteK1 or Drytek2
>>3. Spin coating e-beam resist and pattern it
>>4. metalization and lift off
>>5. O2 plasma dry etching in Drytek1 or DryteK2
>>I consider this process is a gold contanmiated process
>>if you have any questions, please let me know.
>>Mary X. Tang, Ph.D.
>>Stanford Nanofabrication Facility
>>CIS Room 136, Mail Code 4070
>>Stanford, CA 94305
>><mailto:mtang at stanford.edu>mtang at stanford.edu
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA 94305
><mailto:mtang at stanford.edu>mtang at stanford.edu
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