processing of SiC in SNF...

[Robert Huang]

Dear Specmat committee:

Is SiC an approved material for processing on any SNF equipment?  If so, I'd appreciate any details in terms of what contamination category it is, which tools it is approved for, and any other protocol that I should follow.

Regards,

Robert Huang
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101210/0bf4c486/attachment.html>