processing of SiC in SNF...
Ed Myers
edmyers at stanford.edu
Fri Dec 10 15:41:54 PST 2010
Robert,
We have experience of running SiC from Berkeley. We would need to
talk about what steps you need and determine the appropriate equipment.
Regards,
At 03:02 PM 12/10/2010, Robert Huang wrote:
>Dear Specmat committee:
>
>Is SiC an approved material for processing on any SNF equipment? If
>so, I'd appreciate any details in terms of what contamination
>category it is, which tools it is approved for, and any other
>protocol that I should follow.
>
>Regards,
>
>Robert Huang
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