processing of SiC in SNF...

Robert Huang roberth at
Fri Dec 10 17:00:03 PST 2010


Thanks for the info.  If you're available, can we talk some on Monday morning?  I won't be at SNF but can give you a call.



-----Original Message-----
From: Ed Myers [mailto:edmyers at] 
Sent: Friday, December 10, 2010 3:42 PM
To: Robert Huang; specmat at
Subject: Re: processing of SiC in SNF...


We have experience of running SiC from Berkeley.  We would need to 
talk about what steps you need and determine the appropriate equipment.


At 03:02 PM 12/10/2010, Robert Huang wrote:
>Dear Specmat committee:
>Is SiC an approved material for processing on any SNF equipment?  If 
>so, I'd appreciate any details in terms of what contamination 
>category it is, which tools it is approved for, and any other 
>protocol that I should follow.
>Robert Huang

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