Be on Si

Ed Myers edmyers at stanford.edu
Tue Dec 14 15:03:34 PST 2010


Frank,

Could you provide the MSDS sheet for Be.  Please make sure you read 
the MSDS and let us know more about how you expect to process the Be layer.

Ed


At 02:11 PM 12/14/2010, Frank Chen wrote:
>Hi,
>
>I was wondering if it is possible to do beryllium deposition on a 
>silicon wafer and etch the silicon. Thank you.
>
>-Frank





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