Be on Si

Frank Chen fc3 at stanford.edu
Tue Dec 14 15:24:01 PST 2010


Here is the MSDS sheet for Be solid. I think the main concern is during 
deposition when it is not in its solid form where it can be highly toxic. If 
it's not possible to do the deposition at the SNF, I was wondering if the Si 
etching can be done (with the Be layer on).

-Frank

-----Original Message----- 
From: Ed Myers
Sent: Tuesday, December 14, 2010 3:03 PM
To: Frank Chen ; specmat at snf.stanford.edu
Subject: Re: Be on Si

Frank,

Could you provide the MSDS sheet for Be.  Please make sure you read
the MSDS and let us know more about how you expect to process the Be layer.

Ed


At 02:11 PM 12/14/2010, Frank Chen wrote:
>Hi,
>
>I was wondering if it is possible to do beryllium deposition on a silicon 
>wafer and etch the silicon. Thank you.
>
>-Frank

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