[POSSIBLE VIRUS:###] [Fwd: GaN Material]
Ed Myers
edmyers at stanford.edu
Mon Feb 1 12:45:14 PST 2010
Gavin,
What Mary asks is actually only part of the equation. We need to be
concerned about any contaminates which might have been introduced
during processing. When we receive a request on an unknown substrate
we typically ask for TXRF data to quantify what might be in the film
and substrate. The trace analysis is used to quantify what level of
contamination might brought in with the samples.
Regards,
Ed
At 11:08 AM 2/1/2010, Mary Tang wrote:
>Hi Gavin --
>
>
>Please let us know which processes you want to use for your
>material. We'll have to consider the stability and cleanliness level
>of your materials with regard to the processes you want to use.
>
>Thanks,
>
>Mary
>
>
>Mahnaz Mansourpour wrote:
>> From Gavin Zhu behalf.
>>
>>mahnaz
>>
>>------------------------------------------------------------------------
>>
>>Subject:
>>GaN Material
>>From:
>>"Gavin Zhu [US Gavin Zhu]" <tzhu at us.aosmd.com>
>>Date:
>>Fri, 29 Jan 2010 16:54:25 -0800
>>To:
>>"Mary Tang" <mtang at stanford.edu>, <mahnaz at snf.stanford.edu>
>>
>>To:
>>"Mary Tang" <mtang at stanford.edu>, <mahnaz at snf.stanford.edu>
>>
>>
>>Dear Committee,
>>
>>As I mentioned in previous email, the special material panel mail
>>is not through for me.
>>
>>Since I discuss with Uli, she need to know my material (GaN
>>epitaxial on top of sapphire) in which equipment group.
>>
>>I would like to appeal as Clean material, but it depends on your
>>approval, The GaN will not decompose until 1500C.
>>
>>Here is some link about GaN http://en.wikipedia.org/wiki/Gallium_nitride
>>
>>Your professional consideration will be much appreciated,
>>
>>Best regards,
>>
>>Gavin
>>
>>**Alpha & Omega Semiconductor, Inc.**
>>
>>495 Mercury Drive | Sunnyvale CA 94085 | USA
>>
>>Direct: 408-789-3207 | Fax: 408-830-9749
>>
>>Email: tzhu at aosmd.com <mailto:tzhu at aosmd.com>
>
>
>--
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA 94305
>(650)723-9980
>mtang at stanford.edu
>http://snf.stanford.edu
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