Request for dirty polySi

Meredith Marie Lee mmlee at stanford.edu
Mon Feb 22 16:04:16 PST 2010


Greetings, 

I'm interested in depositing ~2-3 microns of dirty polysilicon on 3.4mm-6.4mm thick quartz wafers (3-4" in diameter). Any updates on our capabilities for this in SNF would be greatly appreciated!

Thanks,
-Meredith

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Meredith M. Lee
Stanford University
Ph.D. Candidate, Dept. of Electrical Engineering
Center for Integrated Systems
420 Via Ortega, Stanford, CA 94305-4075
Fax: (650) 723-4659
mmlee at stanford.edu



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