Request for dirty polySi

Meredith Marie Lee mmlee at
Mon Feb 22 16:04:16 PST 2010


I'm interested in depositing ~2-3 microns of dirty polysilicon on 3.4mm-6.4mm thick quartz wafers (3-4" in diameter). Any updates on our capabilities for this in SNF would be greatly appreciated!


Meredith M. Lee
Stanford University
Ph.D. Candidate, Dept. of Electrical Engineering
Center for Integrated Systems
420 Via Ortega, Stanford, CA 94305-4075
Fax: (650) 723-4659
mmlee at

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