Visit to See Silane Setup on 01/06/09
edmyers at stanford.edu
Mon Jan 11 13:20:58 PST 2010
Yes, we have a poly-silicon furnace plumbed with both dopants. Right
now it is for clean samples, where your sample would be considered
gold contaminated. I have copied the specmat group which is
responsible for any changes to our cleanliness or contamination
levels. To run what you ask, does require this group to assign a
poly furnace to the gold contaminated equipment set. If you want to
make this change, you will need to fill out the paperwork starting at
Also, there will be a memory effect as you switch dopant gases. This
should be factored in to your process planning. If you don't remove
or seal the dopants, you will get a lot of compensated doping and not
sharp dopant transitions.
At 11:01 AM 1/11/2010, Thulasidharan Gandhi wrote:
>Dear Ed Myers,
>It was nice meeting you the other day and knowing about the research
>capabilities you have. We have one final question before we go ahead
>with the application for training and using your facility.
>This is what we are planning to do: We are planning to grow Si nanowires
>onto alumina template.
>We will have gold deposited into the alumina template and grow the Si
>nanowires using silane at around 500C. In the growth of Si nanowires we
>want to dope phosphor and boron alternatively to grow PN Si nanowires.
>The other day you told us that your system is capable of doping phosphor
>and boron. We want to once again make sure whether it can be done by
>switching the gas supply.
>From: Ed Myers [mailto:edmyers at stanford.edu]
>Sent: Wednesday, January 06, 2010 7:43 AM
>To: Thulasidharan Gandhi
>Subject: RE: Visit to See Silane Setup on 01/06/09
>Yes, I do have to make a change. Last night I was not by my calendar
>and I forgot about a 1:30-3pm training I have to provide today. Can
>we meet after 3pm?
>At 07:47 PM 1/5/2010, you wrote:
> >Dear Ed Myers,
> >Thats ok. I am not sure whether we can make it before 10 am. So i
> >think 1-3 pm should be ok with us. I will meet you tomorrow at 1pm.
> >Let me know if there is any changes.
> >Thulasi Gandhi
> >From: Ed Myers [mailto:edmyers at stanford.edu]
> >Sent: Tue 1/5/2010 7:12 PM
> >To: Thulasidharan Gandhi
> >Subject: Re: Visit to See Silane Setup on 01/06/09
> >Thulasi Gandhi,
> >I found out late today, I have to participate in a phone conference
> >at 11am on Wednesday. On Wednesday, I have time before 10am or
> >between 1-3pm. Sorry for the late change, but please let me know if
> >either of these times will work for you.
> >At 02:51 PM 1/4/2010, you wrote:
> > >Dear Edward Myers,
> > >
> > >I just spoke to you over the phone about visiting your lab on
> > >Wednesday (01/06/09) at 11am. You can email me back the directions.
> > >
> > >Thanks for your help.
> > >
> > >Regards,
> > >
> > >Thulasi Gandhi
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