Visit to See Silane Setup on 01/06/09

Ed Myers edmyers at
Mon Jan 11 13:20:58 PST 2010

Thulasi Gandhi,

Yes, we have a poly-silicon furnace plumbed with both dopants.  Right 
now it is for clean samples, where your sample would be considered 
gold contaminated.  I have copied the specmat group which is 
responsible for any changes to our cleanliness or contamination 
levels.  To run what you ask, does require this group to assign a 
poly furnace to the gold contaminated equipment set.  If you want to 
make this change, you will need to fill out the paperwork starting at

Also, there will be a memory effect as you switch dopant gases.  This 
should be factored in to your process planning.  If you don't remove 
or seal the dopants, you will get a lot of compensated doping and not 
sharp dopant transitions.


At 11:01 AM 1/11/2010, Thulasidharan Gandhi wrote:
>Dear Ed Myers,
>It was nice meeting you the other day and knowing about the research
>capabilities you have. We have one final question before we go ahead
>with the application for training and using your facility.
>This is what we are planning to do: We are planning to grow Si nanowires
>onto alumina template.
>We will have gold deposited into the alumina template and grow the Si
>nanowires using silane at around 500C. In the growth of Si nanowires we
>want to dope phosphor and boron alternatively to grow PN Si nanowires.
>The other day you told us that your system is capable of doping phosphor
>and boron. We want to once again make sure whether it can be done by
>switching the gas supply.
>Thulasi Gandhi
>-----Original Message-----
>From: Ed Myers [mailto:edmyers at]
>Sent: Wednesday, January 06, 2010 7:43 AM
>To: Thulasidharan Gandhi
>Subject: RE: Visit to See Silane Setup on 01/06/09
>Thulasi Gandhi,
>Yes, I do have to make a change.  Last night I was not by my calendar
>and I forgot about a 1:30-3pm training I have to provide today.  Can
>we meet after 3pm?
>At 07:47 PM 1/5/2010, you wrote:
> >Dear Ed Myers,
> >
> >Thats ok. I am not sure whether we can make it before 10 am. So i
> >think 1-3 pm should be ok with us. I will meet you tomorrow at 1pm.
> >Let me know if there is any changes.
> >
> >Thanks
> >
> >Thulasi Gandhi
> >
> >
> >----------
> >From: Ed Myers [mailto:edmyers at]
> >Sent: Tue 1/5/2010 7:12 PM
> >To: Thulasidharan Gandhi
> >Subject: Re: Visit to See Silane Setup on 01/06/09
> >
> >Thulasi Gandhi,
> >
> >I found out late today, I have to participate in a phone conference
> >at 11am on Wednesday.  On Wednesday, I have time before 10am or
> >between 1-3pm.  Sorry for the late change, but please let me know if
> >either of these times will work for you.
> >
> >Regards,
> >Ed
> >
> >
> >At 02:51 PM 1/4/2010, you wrote:
> > >Dear Edward Myers,
> > >
> > >I just spoke to you over the phone about visiting your lab on
> > >Wednesday (01/06/09) at 11am. You can email me back the directions.
> > >
> > >Thanks for your help.
> > >
> > >Regards,
> > >
> > >Thulasi Gandhi
> >

More information about the specmat mailing list