processing of Ti foil in SNF...
roberth at quswami.com
Thu Jan 14 08:23:14 PST 2010
There is one additional tool that we'd like to process the 99.99+% purity Ti foils on:
Wbsolvent - for an acetone/IPA clean
I'm assuming this is also OK, but please confirm.
From: Robert Huang
Sent: Wednesday, December 16, 2009 8:54 AM
To: 'Ed Myers'; specmat at snf.stanford.edu
Subject: RE: final correction...RE: processing of Ti foil in SNF?
Thanks for the reply. We expect the anneal condition to be between 400C and 600C for several hours.
From: Ed Myers [mailto:edmyers at stanford.edu]
Sent: Tuesday, December 15, 2009 2:55 PM
To: Robert Huang; specmat at snf.stanford.edu
Subject: Re: final correction...RE: processing of Ti foil in SNF?
My concern is your anneal temperature. Ti can
oxidize extremely fast and the atmospheric tubes
will have a background of oxygen. I don't see a
problem with what you have proposed depending on
your anneal, which you have not outlined.
At 09:11 AM 12/15/2009, Robert Huang wrote:
>OK, I think I will get it right this time - for all 3 units:
>0.25mm=250um (not nm!)=10mils
>Sorry for the confusion and multiple emails.
>From: Robert Huang
>Sent: Tuesday, December 15, 2009 9:05 AM
>To: Robert Huang; specmat at snf.stanford.edu
>Subject: RE: processing of Ti foil in SNF?
>Just one correction to my email, the thickness
>of the material is 10mils, not 1mil (the
>dimensions I gave of 0.25mm and 250nm are correct).
>From: Robert Huang
>Sent: Monday, December 14, 2009 11:32 AM
>To: specmat at snf.stanford.edu
>Subject: processing of Ti foil in SNF?
>SNF Specmat Committee:
>I am interested in processing pieces of Ti foil
>in SNF on the following pieces of equipment:
>1) Wbgeneral for cleaning/rinsing
>2) Innotec for a metal deposition
>3) Tylan 4 (metal-contaminated) for an anneal
>The sample size will be <2"x2" (that's currently
>the total sample size that I will have) and the
>thickness is 0.25mm (250nm/1mil) . The source
>for the material will be Alfa Aesar, and it is
>99.99+% purity. Here is Alfa Aesar's website
>for this material, and I am attaching their MSDS.
>Thanks in advance for taking this into
>consideration. I am hoping this is
>straightforward and can be approved quickly
>given Ti is already a material commonly used
>throughout SNF, this material is 99.99+% pure
>Ti, and the tools that I plan to use are all in
>the Au-contaminated category. If any questions,
>don't hesitate to contact me either by email or
>phone, <mailto:roberth at quswami.com>roberth at quswami.com, 408-854-0450.
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