curious about recent inquiries

Mary Tang mtang at
Mon Jun 21 09:57:52 PDT 2010

Hi J --

Sorry about that, I guess I still haven't caught up on emails from vacation.

1.  Precursor materials are OK provided:  we maintain levels below 
threshold; the chemical is registered on the Stanford Chemicals 
database; the MSDS are on file both with SNF and Stanford.  Please let 
us know in advance when chemicals are ordered and what kind of storage 
may be required.  Let us know when they arrive and provide us with MSDS 
so this information can be entered in the Stanford chemicals database.  
Depending on the changeout frequency, we may need to come up with a 
tracking system.

2.  The Unity polymer and developer 9000 are OK to use in the manual 
spin and develop stations, bake plates, and bake ovens other than singe 
and YES.  Let us know if you plan to use this elsewhere.  Also let us 
know how much you plan to order.  Storage space is a concern, so the 
less you can order, the better. 

We'll need yellow tags on these chemicals.  By the way, I was just 
talking with Jim McV.  We will need to post plans for bringing up the 
new processes.  We should identify processes/customers.  We should have 
estimated timelines and budgets for supplies (chemicals, gases, 
wafers).  (We [the new equipment group] should all give this some 
thought and meet up some time to make sure we all have the same agenda.)


J Provine wrote:
> hello specmat,
> i haven't heard anything about a couple of recent inquiries i've made:
> 1) list of precursor materials for the fiji/savanah ald systems.  ted 
> berg said these were all good to go, but i wanted to check the status 
> officially.
> 2) sacrificial polymer Unity and its developer Developer 9000.
> please let me know what the status of these requests are and if i can 
> provide any additional information.
> j

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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