curious about recent inquiries
jprovine at stanford.edu
Mon Jun 21 10:42:24 PDT 2010
for unity (post-development), we would like to go into matrix, gasonics, and
drytek2 (O2 plasma/ashing systems for isotropic release etching). the other
point of unity was to provide a polymer as a sacrificial for ALD deposition
- so it would go in the less clean chamber of the fiji.
i'm setting up a tracking protocol for precursors on the ald systems...the
wiki is the main information source to the users and i'm hoping coral will
track material usage sufficiently. i'll present what i have when the next
new equipment meeting happens.
On Mon, Jun 21, 2010 at 9:57 AM, Mary Tang <mtang at stanford.edu> wrote:
> Hi J --
> Sorry about that, I guess I still haven't caught up on emails from
> 1. Precursor materials are OK provided: we maintain levels below
> threshold; the chemical is registered on the Stanford Chemicals database;
> the MSDS are on file both with SNF and Stanford. Please let us know in
> advance when chemicals are ordered and what kind of storage may be required.
> Let us know when they arrive and provide us with MSDS so this information
> can be entered in the Stanford chemicals database. Depending on the
> changeout frequency, we may need to come up with a tracking system.
> 2. The Unity polymer and developer 9000 are OK to use in the manual spin
> and develop stations, bake plates, and bake ovens other than singe and YES.
> Let us know if you plan to use this elsewhere. Also let us know how much
> you plan to order. Storage space is a concern, so the less you can order,
> the better.
> We'll need yellow tags on these chemicals. By the way, I was just talking
> with Jim McV. We will need to post plans for bringing up the new processes.
> We should identify processes/customers. We should have estimated timelines
> and budgets for supplies (chemicals, gases, wafers). (We [the new equipment
> group] should all give this some thought and meet up some time to make sure
> we all have the same agenda.)
> J Provine wrote:
>> hello specmat,
>> i haven't heard anything about a couple of recent inquiries i've made:
>> 1) list of precursor materials for the fiji/savanah ald systems. ted berg
>> said these were all good to go, but i wanted to check the status officially.
>> 2) sacrificial polymer Unity and its developer Developer 9000.
>> please let me know what the status of these requests are and if i can
>> provide any additional information.
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
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