mtang at stanford.edu
Wed Jun 23 16:10:38 PDT 2010
No, but we do have some systems with both H2 and Ar (oxidation furnaces,
tylansige). I'm supposing there may be temperature, interlock, and
cleanliness concerns with graphene and trace organics removal. Does
anyone see a reasonable path here?
Ed Myers wrote:
> I don't think we have H2 in Argon.
> At 02:29 PM 6/23/2010, Mary Tang wrote:
>> Hello fellow SpecMat'ers --
>> Here is a request (actually, two) from a UCSB student, soon to join
>> the lab.
>> -------- Original Message --------
>> Subject: SpecMat
>> Date: Wed, 23 Jun 2010 14:22:54 -0700
>> From: Kaveh Milaninia <mailto:kavehm at ece.ucsb.edu><kavehm at ece.ucsb.edu>
>> To: <mailto:mtang at snf.stanford.edu><mtang at snf.stanford.edu>
>> It was very nice meeting you on Monday. I'm still waiting for my PI
>> to come back from a talk in order to sign the papers needed to get
>> access to the lab as well as the CIS grant. In the meantime I was
>> wondering if I could make a couple SpecMat requests.
>> 1. Acetone Vapor Clean:
>> Materials: PMMA coated Silicon samples
>> Process: A small 50 mL container is filled with approximately 20-30
>> mL of acetone and heated to 80C. The container itself is sealed with
>> the exception of a very small, 1-2 mm hole, in the lid to allow for
>> the escape of acetone vapor. Samples coated with a PMMA film are
>> placed on the hole with the PMMA side down to allow for the removal
>> of PMMA without excess capillary forces.
>> 2. Carbon Nanofilm Anneal
>> Material: Graphene on Silicon samples
>> Process: Silicon pieces with graphene on top are cleaned under an
>> atmosphere of hydrogen (4%) in argon at 300-400C to remove residual
>> resist or other organic contaminants present on graphene surfaces.
>> Argon is needed instead of nitrogen to ensure minimal oxygen in
>> presence of and prevent the doping of the graphene samples.
>> Please let me know if any further information is required. Thanks.
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA 94305
>> <mailto:mtang at stanford.edu>mtang at stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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