[Fwd: Warning about TMAH]

Mary Tang mtang at stanford.edu
Wed Jun 23 16:21:44 PDT 2010

Hi all --

This is a surprise to me -- I wasn't aware TMAH was so toxic.  We should 
revisit our chemical handling procedures at wbgeneral and wbgaas (where 
labmembers use 40% TMAH for silicon etching) and svgdev and the manual 
develop benches (MF 26 developer is about 2-3% TMAH.)


-------- Original Message --------
Subject: 	Warning about TMAH
Date: 	Wed, 23 Jun 2010 11:59:13 +0200
From: 	Crabb, Kevin M. <KevinM.Crabb at lamresearch.com>
To: 	mtang at stanford.edu <mtang at stanford.edu>

Hi Mary,

Greetings from Lam Research AG in Villach, Austria (formerly SEZ)!  I've 
been working here 3 months now, and so far I'm enjoying it quite a lot!  
I just got a forward about TMAH and severe respiratory problems (leading 
to 3 deaths) after exposure to skin.  I'm not sure if you and the rest 
of the SNF staff/students were aware of this, so I just thought I'd pass 
it on.

I hope you're doing well!



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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