PMDS in stsetch request

Erik Garnett erik.garnett at gmail.com
Tue Mar 2 17:11:43 PST 2010


Hi,

I'd like to try and make silicon on PDMS by curing PDMS on top of an SOI
wafer and then etching back through the handle in stsetch.  The SOI will be
run through the standard cleaning procedure before applying the PDMS.  The
PDMS will be cured in a vacuum oven at 80C.  I've talked to Nancy and she is
OK with me giving it a try using the Al holder as long as I am cleared to
use cured PDMS in stsetch.  Please let me know if you have any further
questions.  Thanks!

Erik Garnett
(egarnett)
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