Addition to request to use aluminum tri-sec butoxide in SNF...

Mary Tang mtang at stanford.edu
Wed Mar 10 14:44:46 PST 2010


Hi all --

I've just asked Robert for the detailed procedures for what he wants to 
do. (I don't know the chemistries, but am a little concerned that these 
are water and air reactive enough to specifically require dry propanol.)

Mary

Robert Huang wrote:
>
> Dear SNF Spec Mat committee:
>
> In addition to using aluminum tri-sec butoxide from Sigma-Aldrich, I’d 
> like to use the following chemicals from Strem (links to Strem website 
> are given and MSDS sheets attached):
>
> 1) Aluminum s-butoxide - http://www.strem.com/catalog/v/93-1308/ 
> (composition is actually the same as aluminum tri-sec butoxide from 
> Sigma Aldrich, my original request)
>
> 2) Hafnium t-butoxide - http://www.strem.com/catalog/v/72-5800/
>
> 3) Tetramethoxysilane - http://www.strem.com/catalog/v/93-1459/
>
> 4) Zirconium n-butoxide - http://www.strem.com/catalog/v/93-4003/
>
> As with the aluminum tri-sec butoxide, I would be diluting these 
> materials in dry2-propanol (or methanol) and dipping my 4” wafers into 
> the solution. Total solution will remain 100-200mL, just enough to 
> immerse my wafers, and I will then process the wafers on innotec and 
> metallica.
>
> Please review these chemicals as well and let me know if there are any 
> concerns.
>
> Regards,
>
> Robert
>
> *From:* Robert Huang
> *Sent:* Friday, March 05, 2010 9:15 AM
> *To:* specmat at snf.stanford.edu
> *Subject:* request to use aluminum tri-sec butoxide in SNF...
>
> Dear SNF Spec Mat committee:
>
> I would like to use a new chemical in SNF, aluminum tri-sec butoxide 
> (99.99% trace metal basis), and would be obtaining 5-10mL in solution 
> from Sigma-Aldrich. Below is a link to their website on this material:
>
> http://www.sigmaaldrich.com/catalog/ProductDetail.do?lang=en&N4=511609|ALDRICH&N5=SEARCH_CONCAT_PNO|BRAND_KEY&F=SPEC 
> <http://www.sigmaaldrich.com/catalog/ProductDetail.do?lang=en&N4=511609%7CALDRICH&N5=SEARCH_CONCAT_PNO%7CBRAND_KEY&F=SPEC>
>
> In addition, I’m attaching the MSDS sheet for this material.
>
> My intent is to dilute this material (comes in liquid form) in 
> dry2-propanol, then dip my 4” wafers into the solution. I presume this 
> processing would need to be done at wbsolvent. I plan to use 100-200mL 
> of total solution in quartzware, basically whatever is the minimum 
> amount needed that will allow me to immerse my wafers in the solution. 
> Afterwards I intend to process the wafers further on the innotec and 
> metallica tools.
>
> Please let me know if there are any concerns or any special handling 
> requirements.
>
> Regards,
>
> Robert Huang
>
> roberth at quswami.com <mailto:roberth at quswami.com>
>
> 408-854-0450
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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