additional material...RE: Addition to request to use aluminum tri-sec butoxide in SNF...

Robert Huang roberth at quswami.com
Wed Mar 10 17:52:49 PST 2010


Dear SNF Spec Mat committee:

Attached is a paper which provides more details on how I plan to use these chemicals.  Look at the 1st paragraph in "Experimental Section" on p. 476 as well as the paragraph on p. 477 that starts "After sintering...".

Regards,

Robert
________________________________
From: Robert Huang
Sent: Monday, March 08, 2010 12:46 PM
To: specmat at snf.stanford.edu
Subject: Addition to request to use aluminum tri-sec butoxide in SNF...

Dear SNF Spec Mat committee:

In addition to using aluminum tri-sec butoxide from Sigma-Aldrich, I’d like to use the following chemicals from Strem (links to Strem website are given and MSDS sheets attached):


1)      Aluminum s-butoxide - http://www.strem.com/catalog/v/93-1308/ (composition is actually the same as aluminum tri-sec butoxide from Sigma Aldrich, my original request)

2)      Hafnium t-butoxide - http://www.strem.com/catalog/v/72-5800/

3)      Tetramethoxysilane - http://www.strem.com/catalog/v/93-1459/

4)      Zirconium n-butoxide - http://www.strem.com/catalog/v/93-4003/

As with the aluminum tri-sec butoxide, I would be diluting these materials in dry2-propanol (or methanol) and dipping my 4” wafers into the solution.  Total solution will remain 100-200mL, just enough to immerse my wafers, and I will then process the wafers on innotec and metallica.

Please review these chemicals as well and let me know if there are any concerns.

Regards,

Robert

From: Robert Huang
Sent: Friday, March 05, 2010 9:15 AM
To: specmat at snf.stanford.edu
Subject: request to use aluminum tri-sec butoxide in SNF...

Dear SNF Spec Mat committee:

I would like to use a new chemical in SNF, aluminum tri-sec butoxide (99.99% trace metal basis), and would be obtaining 5-10mL in solution from Sigma-Aldrich.  Below is a link to their website on this material:

http://www.sigmaaldrich.com/catalog/ProductDetail.do?lang=en&N4=511609|ALDRICH&N5=SEARCH_CONCAT_PNO|BRAND_KEY&F=SPEC

In addition, I’m attaching the MSDS sheet for this material.

My intent is to dilute this material (comes in liquid form) in dry2-propanol, then dip my 4” wafers into the solution.  I presume this processing would need to be done at wbsolvent.  I plan to use 100-200mL of total solution in quartzware, basically whatever is the minimum amount needed that will allow me to immerse my wafers in the solution.  Afterwards I intend to process the wafers further on the innotec and metallica tools.

Please let me know if there are any concerns or any special handling requirements.

Regards,

Robert Huang
roberth at quswami.com<mailto:roberth at quswami.com>
408-854-0450
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