HF/BOE based chemicals for our trials

Mary Tang mtang at stanford.edu
Wed Mar 17 16:03:44 PDT 2010

Hi Erhan --

These should be OK to use. These should be stored in the chemicals 
passthrough. Please check with Uli to make sure there is sufficient 
space in there first.

If there is, please get in touch with Mahnaz to obtain yellow labels and 
barcodes -- and log your chemicals in the book. Fill out the labels. 
Make sure to write in a "to remove by" date. Ask a staff member to help 
you place your labeled chemicals in the passthrough.

When you use the chemicals, waste chemical and first few rinses should 
be put into the HF drain.



Erhan Ata wrote:
> Hi Mary, Mahnaz and David,
> Attached are MSDS for the custom chemical that we’ve ordered from 
> Sachem (SE-1140). Apparently they have shipped it earlier than we 
> asked for and had already been delivered to SNF. There should be two 1 
> gallon containers.
> We also would like to order another chemical, known as *Silox Vapox 
> III* from Transene, (http://www.transene.com/sio2.html#silox). We have 
> not ordered it yet but I would like to order *one quart* this week and 
> we should receive next week if that’s OK.
> I also attached an MSDS for Silox Vapox.
> We plan to use WBGAAS, or WBGENERAL and should need the chemicals for 
> 3 months or less (tentatively), depending on the results we get, we 
> may give up using them earlier or ask for extension.
> Please let me know if I need to provide further info.
> Sincerely,
> Erhan Ata
> Fortemedia, Inc.
> Cell: (650) 224 7894

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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