Request to use Nb(Niobium) and Sn(Tin) targets in Metalica
Jiquan Guo
jqguo at stanford.edu
Tue Mar 30 10:41:30 PDT 2010
Contact name: Jiquan Guo (650)804-9662, jqguo at stanford.edu, coral name jqguo
PI: Sami Tantawi
Chemical to be used: Nb(Niobium) sputtering target, Sn(Tin) sputtering
target
Vendor info:
http://www.lesker.com/newweb/deposition_materials/depositionmaterials_CertFo
rm.cfm?partno=EJTSNXX501A4
http://www.lesker.com/newweb/deposition_materials/depositionmaterials_CertFo
rm.cfm?partno=EJTNBXX351A2
Reason for request: sputter Nb, Sn, Ti to form superconducting films on
Sapphire
Process flow: Clean Sapphire substrate at Wbgen, sputter 1 or 2 of Nb/Ti/Sn
in Metalica.
Amount and form: one target(1" Dia and 0.125" thickness) for each material
Storage: Outside
Disposal: NA
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