PI-2562 and VM-651

Usha Raghuram usharaghuram at gmail.com
Thu May 27 11:07:00 PDT 2010


Hi,

I would like to use PI-2562, a polyimide and the adhesion promoter VM-651
both from HD Microsystems for spin coating and filling cavities in quatrz
and SI wafers.  Once spin coated, they will be cured in hot plate and
patterned and etched or CMPed.  We may also be depositing metal on it in
Innotec.  Attached are the data sheets and MSDS for these two materials.
Kindly advise me if I need to provide any additional information for taking
this material into the fab.

Regards,

Usha
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