PI-2562 and VM-651

Mary Tang mtang at stanford.edu
Thu May 27 11:21:09 PDT 2010

Hi Usha --

Yes, these chemicals have been approved for use at SNF, with certain 

Please include a process runsheet or list of equipment you plan to use.  
Only the headway may be used for spin coating polyimides.  Please check 
on current procedures, as I think there are certain procedures for 
polyimide.  Soft bake can be done on a hotplate, but the substrates 
would need to be transported in an enclosed box to this station and the 
hot plate would need to be covered with foil.  Cure can also be done on 
the hot plate, but only for a limited time and temperature.  Curing to 
create a structural material is typically done in the Blue M oven.  Let 
us know which tool you plan to use for etching.

These would be stored in the personal chemicals storage area of the 
flammables cabinet.  Labels and barcodes would be required as well.


Usha Raghuram wrote:
> Hi,
> I would like to use PI-2562, a polyimide and the adhesion promoter 
> VM-651 both from HD Microsystems for spin coating and filling cavities 
> in quatrz and SI wafers.  Once spin coated, they will be cured in hot 
> plate and patterned and etched or CMPed.  We may also be depositing 
> metal on it in Innotec.  Attached are the data sheets and MSDS for 
> these two materials.  Kindly advise me if I need to provide any 
> additional information for taking this material into the fab.
> Regards,
> Usha

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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