From luckys at stanford.edu  Thu Nov 11 16:22:15 2010
From: luckys at stanford.edu (Lucky Suriyasena Liyanage)
Date: Thu, 11 Nov 2010 16:22:15 -0800 (PST)
Subject: Gd Deposition
In-Reply-To: <1837869610.261768.1289521205467.JavaMail.root@zm03.stanford.edu>
Message-ID: <1661762716.261837.1289521335949.JavaMail.root@zm03.stanford.edu>



Hello everyone,

I am in the need to make carbon nanotube transistors with NFET characteristics. 
One of our competitors have shown that Gd (Gadolinium) deposition for contacts provides NEFT characteristics.

I am wandering if I can have this capability for Innotec.

Here is a website with general information. The end of the page also has the MSDS sheet.

http://www.espirareearth.com/Gadolinium.html

Thank You.

Sincerely,
Lucky



From Salowitz at stanford.edu  Fri Nov 12 14:36:25 2010
From: Salowitz at stanford.edu (Nathan Salowitz)
Date: Fri, 12 Nov 2010 14:36:25 -0800
Subject: Looking to spin coat a 'binder' on a wafer, need approval to bring
 chemical into SNF
Message-ID: <4CDDC169.4050704@stanford.edu>

Hello,
     I'm seeking permission to bring this binder into  the SNF area 
(MSDS attached).

     The intent is to spin coat the binder onto wafers & dry it at 100C 
for 5 min on a hot plate.  Binder burn out will be performed in my own lab.

     This process does not need to be in the clean room, using the spin 
coater near the wafer saw is perfectly acceptable.

     I intend to store the binder in my own lab.

Please let me know if this is ok.

     Sincerely,
         Nate
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Ferro MSDS B75001 Binder.pdf
Type: application/pdf
Size: 53220 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101112/6190fbc2/attachment.pdf>

From mtang at stanford.edu  Sat Nov 13 06:50:58 2010
From: mtang at stanford.edu (Mary Tang)
Date: Sat, 13 Nov 2010 06:50:58 -0800
Subject: Looking to spin coat a 'binder' on a wafer, need approval to
 bring chemical into SNF
In-Reply-To: <4CDDC169.4050704@stanford.edu>
References: <4CDDC169.4050704@stanford.edu>
Message-ID: <4CDEA5D2.7000409@stanford.edu>

Hi Nathan --

Thanks for the info -- the spin coater in the saw room is definitely the 
right place to do this - and thanks for storing in your own lab.  A 
couple of questions.  First, will you be diluting or mixing this 
material?  If so, with what?  Also, I'm a little concerned that some of 
the chemicals may be absorbed in the teflon housing.  Mahnaz has found 
that there are liners for the coater bowl -- could you please follow up 
with her about them?  Or we might brainstorm ideas on how to line the bowl.

There's a programmable hot plate in the saw room -- we'll just need to 
make sure it's under the hood when you use it (I can show you how to set 
it up.)

Please get in touch with Mahnaz or me to show you how to use the coater.

Mary



On 11/12/2010 2:36 PM, Nathan Salowitz wrote:
> Hello,
>     I'm seeking permission to bring this binder into  the SNF area 
> (MSDS attached).
>
>     The intent is to spin coat the binder onto wafers & dry it at 100C 
> for 5 min on a hot plate.  Binder burn out will be performed in my own 
> lab.
>
>     This process does not need to be in the clean room, using the spin 
> coater near the wafer saw is perfectly acceptable.
>
>     I intend to store the binder in my own lab.
>
> Please let me know if this is ok.
>
>     Sincerely,
>         Nate



From mahnaz at stanford.edu  Wed Nov 17 11:19:30 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 17 Nov 2010 11:19:30 -0800
Subject: Fwd: new materials (SpecMat)
Message-ID: <4CE42AC2.8070908@stanford.edu>

Hello
This is from Arnold's  behalf, he has tried few times to send his 
request to specmat committee  with no success.

mahnaz



-------- Original Message --------
Subject: 	new materials (SpecMat)
Date: 	Wed, 17 Nov 2010 11:16:01 -0800
From: 	Arnold Forman <ajforman at stanford.edu>
To: 	mahnaz at snf.stanford.edu



Hi Mahnaz,

I would like to bring glass microscope slides and glass frits (2cm 
diameter) coated with indium tin oxide (ITO) thin films into the 
cleanroom.  I would like to measure the sheet resistance of these films 
(prometrics) and vapor deposit metal back contacts on them (innotec or 
metallica).

Here is a link to a description of the frits:

http://www.chemglass.com/product_view.asp?pnr=CG-201

Please advise.

Thank you,
-Arnold Forman
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101117/df404bc2/attachment.html>

From mtang at stanford.edu  Wed Nov 17 14:20:40 2010
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 17 Nov 2010 14:20:40 -0800
Subject: Fwd: new materials (SpecMat)
In-Reply-To: <4CE42AC2.8070908@stanford.edu>
References: <4CE42AC2.8070908@stanford.edu>
Message-ID: <4CE45538.1060005@stanford.edu>

Hi Arnold --

Sorry, the SpecMat at snf list is filtered -- the originating email has to 
be from your @snf email account or the one you registered as your 
forwarding email.

Glass with ITO is OK to use in metalica and innotec.  Frits should be 
fine as well, I'd think.  Will you be doing photolithography for contact 
definition?  If so, the frits could be a problem, as you can imagine, 
with vacuum chucks and liquids.  If this is the case, check with 
Mahnaz.  From a contamination standpoint, the Prometrix with the gold 
probe should be OK (but check with Ed, the expert).

Mary



Mahnaz Mansourpour wrote:
> Hello
> This is from Arnold's  behalf, he has tried few times to send his 
> request to specmat committee  with no success.
>
> mahnaz
>
>
>
> -------- Original Message --------
> Subject: 	new materials (SpecMat)
> Date: 	Wed, 17 Nov 2010 11:16:01 -0800
> From: 	Arnold Forman <ajforman at stanford.edu>
> To: 	mahnaz at snf.stanford.edu
>
>
>
> Hi Mahnaz,
>
> I would like to bring glass microscope slides and glass frits (2cm 
> diameter) coated with indium tin oxide (ITO) thin films into the 
> cleanroom.  I would like to measure the sheet resistance of these 
> films (prometrics) and vapor deposit metal back contacts on them 
> (innotec or metallica).
>
> Here is a link to a description of the frits:
>
> http://www.chemglass.com/product_view.asp?pnr=CG-201
>
> Please advise.
>
> Thank you,
> -Arnold Forman 


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101117/eb03e313/attachment.html>

From roberth at quswami.com  Wed Nov 17 14:34:24 2010
From: roberth at quswami.com (Robert Huang)
Date: Wed, 17 Nov 2010 14:34:24 -0800
Subject: request to use new material 4-tert-butylpyridine in SNF
Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB11FAEB92BF4@QUSWAMI-DSRV1.quswami.local>

Dear Specmat Committee:

I would like to use the following liquid, 4-tert-butylpyridine, in SNF at one of the wetbenches.  Attached is the MSDS sheet for this material which is a liquid.  The way I plan to use it is to immerse my wafers/wafer pieces completely in this liquid at room temperature for several minutes at a time.  Afterwards, I will dry my samples with nitrogen.  My samples are considered gold-contaminated, so I assume I would use either wbsolvent or wbgeneral and the related gold-contaminated glassware (or my own glassware if the committee would like me to use my own).  After this liquid chemistry is complete, my samples will be done with processing and taken out of the clean room, so they will not be processed on any other equipment than the wet bench.

If any questions, don't hesitate to contact me.

Regards,

Robert Huang
roberth at quswami.com
408-854-0450
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101117/7b45725a/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: 4-tert-butylpyridine_MSDS.pdf
Type: application/pdf
Size: 33150 bytes
Desc: 4-tert-butylpyridine_MSDS.pdf
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101117/7b45725a/attachment.pdf>

From mahnaz at stanford.edu  Fri Nov 19 08:52:10 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 19 Nov 2010 08:52:10 -0800
Subject: Fwd: Re: SNF training on EVG 101 Resist spray coater
Message-ID: <4CE6AB3A.4050504@stanford.edu>


I am sending this to see what does every one thinks?
Originally before they become lab members I had told them that I am not 
open to run things of this nature.

mahnaz

-------- Original Message --------
Subject: 	Re: SNF training on EVG 101 Resist spray coater
Date: 	Thu, 18 Nov 2010 17:04:11 -0800
From: 	Mike Young <mike.young at innovadynamics.com>
To: 	Mahnaz Mansourpour <mahnaz at stanford.edu>
CC: 	Matthew Robinson <matt at innovadynamics.com>



Mahnaz,

Is it possible to spray a resist, coating, and/or solvent containing 
silver nanoparticles through the tool?  If we do spray these, we can run 
a lot of solvent through each time after use to clean the parts, or we 
could buy our own nozzles and hoses that are will be metal contaminated 
and interchange parts when we use the tool.

When is the next training session for the spray coater?

Mike

On Thu, Nov 18, 2010 at 3:49 PM, Mahnaz Mansourpour <mahnaz at stanford.edu 
<mailto:mahnaz at stanford.edu>> wrote:

    Hi Mike,

    I think that I have mentioned to you the spray coater is here and
    few of us have been working on it diligently
    but with more than a 10 variables on the system we do not have a
    standard recipe per say to offer every individual.
    so tell me what is it that you want and like to suggest???

    mahnaz


    On 11/17/2010 9:39 PM, Mike Young wrote:
>     Hi Mahnaz,
>
>     Matt and I have passed Uli's litho training class.  When is the
>     next training session for the spray coater?
>
>     Besides resist, what other materials may be sprayed through the tool?
>
>     Is there a listing of items purchasable at the SNF store posted
>     somewhere?
>
>     --
>     Mike Young
>     Director of Technology Development
>     Innova Dynamics
>     office: 415.692.5410
>     fax: 415.796.6445
>     www.innovadynamics.com <http://www.innovadynamics.com>
>     1700 Owens Street, Suite 240
>     San Francisco, CA 94158
>
>
>
>     On Tue, Nov 2, 2010 at 9:14 AM, Mike Young
>     <mike.young at innovadynamics.com
>     <mailto:mike.young at innovadynamics.com>> wrote:
>
>         Hi Mahnaz,
>
>         Matt and I are from Innova Dynamics and are industrial users
>         of the SNF.  We would like to receive training on the EVG 101
>         Resist spray coater.  Are you available to train one or both
>         of us 11/5, 11/8 or 11/12?
>
>         --
>         Mike Young
>         Director of Technology Development
>         Innova Dynamics
>         office: 415.692.5410
>         mobile: 267.566.3574
>         fax: 415.796.6445
>         www.innovadynamics.com <http://www.innovadynamics.com>
>         1700 Owens Street, Suite 240
>         San Francisco, CA 94158
>
>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101119/5eb32876/attachment.html>

From edmyers at stanford.edu  Fri Nov 19 09:03:32 2010
From: edmyers at stanford.edu (Ed Myers)
Date: Fri, 19 Nov 2010 09:03:32 -0800
Subject: Fwd: Re: Innovadynamics Technical Liaison
Message-ID: <6.2.5.6.2.20101119090114.0529d6c8@stanford.edu>

All,

These guys have never been up front with what they wanted to do.  I 
suggest they go back through their technical liaison for 
clarification of their needs.  I had a feeling they needed to be watched.

Ed


>Date: Thu, 28 Oct 2010 10:10:24 -0700
>To: Mike Young <mike.young at innovadynamics.com>
>From: Ed Myers <edmyers at stanford.edu>
>Subject: Re: SNF Technical Liaison
>Cc: Maureen Baran <mbaran at stanford.edu>, Matthew Robinson 
><matt at innovadynamics.com>
>
>Mike,
>
>As an organization we don't have much experience on the spray coater 
>since it is a relatively new to our facility.  We will need to make 
>sure we have chucks or a chucking process compatible with the shape 
>of  your sample.  I don't anticipate this being a problem.  The 
>other spray coat question will be solvent compatibility with your 
>plastic substrate, since the resist is heavily diluted during coating.
>
>TEOS is a concern.  I am not sure our system deposition temperature 
>is compatible with either glass or plastic.  I do see lab members 
>use our PECVD oxide deposition at much lower temperatures.  This is 
>not something we enjoy as it takes a long day to complete the 
>deposition do to the pre- and post- cleaning of the chamber.
>
>The metrology tools should not be a problem.  We do request chemical 
>usage of stocked materials.
>
>Any chemicals which are brought in to the facility must be approved 
>by specmat.  This will require MSDS, volumes and how the chemicals 
>will be used and disposed.  As for hand tools and notebooks, they 
>are allowed as long as they are clean room compatible.  We provide 
>all gowning materials.
>
>The concern I see is the oxide deposition.
>
>Ed
>
>At 09:52 AM 10/28/2010, Mike Young wrote:
>>Hi Ed and Maureen,
>>
>>As a first project to familiarize ourselves with the SNF, Matt and 
>>I would like to get trained on the EVG 101 Resist spray coater to 
>>coat resist onto our devices.  These devices have glass and/or 
>>organic polymer from which we would like to pattern conducting 
>>arrays for EMI, solar, and display applications.  The goal with 
>>this project is to study the effect of various surface 
>>functionalizations, etching, and cleaning procedures on the wetting 
>>of glass and plastic substrates with various coatings.  For 
>>etching, we want to use various acids and bases available at SNF to 
>>clean our glass and plastic.  After the photoresist deposition, we 
>>would like to use develop and etch processes to achieve conductive patterns.
>>
>>We would also like to get trained on the TEOS furnace to deposit 
>>silicon dioxide onto our polymer and glass substrates.
>>
>>We would like to then characterize the morphology of these coatings 
>>with the nanospec film thickness measurement system, Alphastep 
>>profilometer, Surf scan particle monitor, and M2000 spectroscopic 
>>ellipsometer.  These goals are preliminary as during the safety 
>>session Monday we will assess the exact capabilities of the 
>>fabrication and characterization tools to see which jobs are 
>>actually appropriate.
>>
>>Can we bring in our own cleaning solvents, coatings, substrates, 
>>and our own handheld tools (forceps, wipes, jars, petri dishes, 
>>notebooks, etc.) on Monday and in future sessions?  Do we have to 
>>declare these items?  What equipment (gloves, bunnysuits, googles, 
>>booties, etc.) be provided?  If we use chemicals already at SNF, 
>>such as IPA, acetone, or photoresist, do we report usage of these chemicals?
>>
>>Please let me know if you have questions and I would be happy to 
>>elaborate further over email or in person.
>>
>>--
>>Mike Young
>>Director of Technology Development
>>Innova Dynamics
>>office: 415.692.5410
>>mobile: 267.566.3574
>>fax: 415.796.6445
>><http://www.innovadynamics.com>www.innovadynamics.com
>>1700 Owens Street, Suite 240
>>San Francisco, CA 94158
>>
>>This electronic message contains information from Innova Dynamics. 
>>The contents may be privileged and confidential and are intended 
>>for the use of the intended addressee(s) only. If you are not an 
>>intended addressee, note that any disclosure, copying, 
>>distribution, or use of the contents of this message is prohibited. 
>>If you have received this e-mail in error, please contact me at 
>><mailto:mey at innovadynamics.com>mey at innovadynamics.com.
>>
>>
>>
>>On Tue, Oct 26, 2010 at 2:45 PM, Ed Myers 
>><<mailto:edmyers at stanford.edu>edmyers at stanford.edu> wrote:
>>Michael,
>>Maureen Baran gave me your paperwork asking me to sign off as the 
>>technical liaison.  From the description, I am not able to tell if 
>>SNF can support your processing needs.  I need more information as 
>>to what you are trying to achieve at the SNF.  I need to know items 
>>such as the materials you will be working on, or bring in to the 
>>fab, a general idea of your device requirements.  I don't want to 
>>compromise your intellectual property, but I make sure your 
>>activities will be safe for our lab members and our equipment.  I 
>>also want to help and make sure you are able to meet your end goals.
>>Regards,
>>Ed




From mtang at stanford.edu  Fri Nov 19 09:06:57 2010
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 19 Nov 2010 09:06:57 -0800
Subject: Fwd: Re: SNF training on EVG 101 Resist spray coater
In-Reply-To: <4CE6AB3A.4050504@stanford.edu>
References: <4CE6AB3A.4050504@stanford.edu>
Message-ID: <4CE6AEB1.1070508@stanford.edu>

Hi Mahnaz and SpecMat --

Our current guideline is that we don't allow processing involving 
nanoparticle dispersals in the fab.  The problem is that aerosols, 
whether they come from off-spray during spin coating or ultrasonic 
nebulization in spray coating, will be easily carried by air flows and 
stick to the first surface they contact.  They will also be incredibly 
difficult to remove.

The exception is latex spheres (i.e. polystyrene beads) -- the reason is 
that normal resist removal processing will get rid of these easily.

Contamination by conductive and magnetic nanoparticles (including 
"magnabeads"), however, can really screw up someone else's experiments.

So, going by this guideline, my recommendation is to say "no" to this 
request.  We could refer them directly to EV or Suss as those companies 
might be willing to collaborate with them.

By the way, we need to watch for this group -- Ed, Maureen, and I have 
found them to be quite dishonest in their dealings with us so far.  If 
you tell them "No" it needs to be clear and not open to "misinterpretation."


Mary



Mahnaz Mansourpour wrote:
>
> I am sending this to see what does every one thinks?
> Originally before they become lab members I had told them that I am 
> not open to run things of this nature.
>
> mahnaz
>
> -------- Original Message --------
> Subject: 	Re: SNF training on EVG 101 Resist spray coater
> Date: 	Thu, 18 Nov 2010 17:04:11 -0800
> From: 	Mike Young <mike.young at innovadynamics.com>
> To: 	Mahnaz Mansourpour <mahnaz at stanford.edu>
> CC: 	Matthew Robinson <matt at innovadynamics.com>
>
>
>
> Mahnaz,
>
> Is it possible to spray a resist, coating, and/or solvent containing 
> silver nanoparticles through the tool?  If we do spray these, we can 
> run a lot of solvent through each time after use to clean the parts, 
> or we could buy our own nozzles and hoses that are will be metal 
> contaminated and interchange parts when we use the tool.
>
> When is the next training session for the spray coater? 
>
> Mike
>
> On Thu, Nov 18, 2010 at 3:49 PM, Mahnaz Mansourpour 
> <mahnaz at stanford.edu <mailto:mahnaz at stanford.edu>> wrote:
>
>     Hi Mike,
>
>     I think that I have mentioned to you the spray coater is here and
>     few of us have been working on it diligently
>     but with more than a 10 variables on the system we do not have a
>     standard recipe per say to offer every individual.
>     so tell me what is it that you want and like to suggest???
>
>     mahnaz
>
>
>     On 11/17/2010 9:39 PM, Mike Young wrote:
>>     Hi Mahnaz,
>>
>>     Matt and I have passed Uli's litho training class.  When is the
>>     next training session for the spray coater?  
>>
>>     Besides resist, what other materials may be sprayed through the
>>     tool?  
>>
>>     Is there a listing of items purchasable at the SNF store posted
>>     somewhere? 
>>
>>     --
>>     Mike Young
>>     Director of Technology Development
>>     Innova Dynamics
>>     office: 415.692.5410
>>     fax: 415.796.6445
>>     www.innovadynamics.com <http://www.innovadynamics.com>
>>     1700 Owens Street, Suite 240
>>     San Francisco, CA 94158 
>>
>>
>>
>>     On Tue, Nov 2, 2010 at 9:14 AM, Mike Young
>>     <mike.young at innovadynamics.com
>>     <mailto:mike.young at innovadynamics.com>> wrote:
>>
>>         Hi Mahnaz,
>>
>>         Matt and I are from Innova Dynamics and are industrial users
>>         of the SNF.  We would like to receive training on the EVG 101
>>         Resist spray coater.  Are you available to train one or both
>>         of us 11/5, 11/8 or 11/12?  
>>
>>         --
>>         Mike Young
>>         Director of Technology Development
>>         Innova Dynamics
>>         office: 415.692.5410
>>         mobile: 267.566.3574
>>         fax: 415.796.6445
>>         www.innovadynamics.com <http://www.innovadynamics.com>
>>         1700 Owens Street, Suite 240
>>         San Francisco, CA 94158 
>>
>>
>
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101119/4fe44cd9/attachment.html>

From mahnaz at stanford.edu  Mon Nov 22 08:26:00 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 22 Nov 2010 08:26:00 -0800
Subject: Fwd: Re: SNF training on EVG 101 Resist spray coater
In-Reply-To: <4CE6AEB1.1070508@stanford.edu>
References: <4CE6AB3A.4050504@stanford.edu> <4CE6AEB1.1070508@stanford.edu>
Message-ID: <4CEA9998.3000401@stanford.edu>

All,

I know, I was not cc'd on their original email to Ed so I was not aware 
what they want to do. I felt uncomfortable just talking to them from 
emails and phone calls without giving me clear idea of what they want to do.

As of right now the will not be getting trained on the spray coater , 
who likes to break the news to them?
secondly, how people get so far in the process without staff having a 
clear idea?


mahnaz


On 11/19/2010 9:06 AM, Mary Tang wrote:
> Hi Mahnaz and SpecMat --
>
> Our current guideline is that we don't allow processing involving 
> nanoparticle dispersals in the fab.  The problem is that aerosols, 
> whether they come from off-spray during spin coating or ultrasonic 
> nebulization in spray coating, will be easily carried by air flows and 
> stick to the first surface they contact.  They will also be incredibly 
> difficult to remove.
>
> The exception is latex spheres (i.e. polystyrene beads) -- the reason 
> is that normal resist removal processing will get rid of these easily.
>
> Contamination by conductive and magnetic nanoparticles (including 
> "magnabeads"), however, can really screw up someone else's experiments.
>
> So, going by this guideline, my recommendation is to say "no" to this 
> request.  We could refer them directly to EV or Suss as those 
> companies might be willing to collaborate with them.
>
> By the way, we need to watch for this group -- Ed, Maureen, and I have 
> found them to be quite dishonest in their dealings with us so far.  If 
> you tell them "No" it needs to be clear and not open to 
> "misinterpretation."
>
>
> Mary
>
>
>
> Mahnaz Mansourpour wrote:
>>
>> I am sending this to see what does every one thinks?
>> Originally before they become lab members I had told them that I am 
>> not open to run things of this nature.
>>
>> mahnaz
>>
>> -------- Original Message --------
>> Subject: 	Re: SNF training on EVG 101 Resist spray coater
>> Date: 	Thu, 18 Nov 2010 17:04:11 -0800
>> From: 	Mike Young <mike.young at innovadynamics.com>
>> To: 	Mahnaz Mansourpour <mahnaz at stanford.edu>
>> CC: 	Matthew Robinson <matt at innovadynamics.com>
>>
>>
>>
>> Mahnaz,
>>
>> Is it possible to spray a resist, coating, and/or solvent containing 
>> silver nanoparticles through the tool?  If we do spray these, we can 
>> run a lot of solvent through each time after use to clean the parts, 
>> or we could buy our own nozzles and hoses that are will be metal 
>> contaminated and interchange parts when we use the tool.
>>
>> When is the next training session for the spray coater?
>>
>> Mike
>>
>> On Thu, Nov 18, 2010 at 3:49 PM, Mahnaz Mansourpour 
>> <mahnaz at stanford.edu <mailto:mahnaz at stanford.edu>> wrote:
>>
>>     Hi Mike,
>>
>>     I think that I have mentioned to you the spray coater is here and
>>     few of us have been working on it diligently
>>     but with more than a 10 variables on the system we do not have a
>>     standard recipe per say to offer every individual.
>>     so tell me what is it that you want and like to suggest???
>>
>>     mahnaz
>>
>>
>>     On 11/17/2010 9:39 PM, Mike Young wrote:
>>>     Hi Mahnaz,
>>>
>>>     Matt and I have passed Uli's litho training class.  When is the
>>>     next training session for the spray coater?
>>>
>>>     Besides resist, what other materials may be sprayed through the
>>>     tool?
>>>
>>>     Is there a listing of items purchasable at the SNF store posted
>>>     somewhere?
>>>
>>>     --
>>>     Mike Young
>>>     Director of Technology Development
>>>     Innova Dynamics
>>>     office: 415.692.5410
>>>     fax: 415.796.6445
>>>     www.innovadynamics.com <http://www.innovadynamics.com>
>>>     1700 Owens Street, Suite 240
>>>     San Francisco, CA 94158
>>>
>>>
>>>
>>>     On Tue, Nov 2, 2010 at 9:14 AM, Mike Young
>>>     <mike.young at innovadynamics.com
>>>     <mailto:mike.young at innovadynamics.com>> wrote:
>>>
>>>         Hi Mahnaz,
>>>
>>>         Matt and I are from Innova Dynamics and are industrial users
>>>         of the SNF.  We would like to receive training on the EVG
>>>         101 Resist spray coater.  Are you available to train one or
>>>         both of us 11/5, 11/8 or 11/12?
>>>
>>>         --
>>>         Mike Young
>>>         Director of Technology Development
>>>         Innova Dynamics
>>>         office: 415.692.5410
>>>         mobile: 267.566.3574
>>>         fax: 415.796.6445
>>>         www.innovadynamics.com <http://www.innovadynamics.com>
>>>         1700 Owens Street, Suite 240
>>>         San Francisco, CA 94158
>>>
>>>
>>
>>
>
>
> -- 
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101122/1b905d76/attachment.html>

From mtang at stanford.edu  Mon Nov 22 08:36:43 2010
From: mtang at stanford.edu (Mary Tang)
Date: Mon, 22 Nov 2010 08:36:43 -0800
Subject: Fwd: Re: SNF training on EVG 101 Resist spray coater
In-Reply-To: <4CEA9998.3000401@stanford.edu>
References: <4CE6AB3A.4050504@stanford.edu> <4CE6AEB1.1070508@stanford.edu> <4CEA9998.3000401@stanford.edu>
Message-ID: <4CEA9C1B.4020306@stanford.edu>

Hi all --

I don't believe they mentioned potential use of the EV spraycoater at 
all until this request.  So, unless anyone says otherwise, I'll respond 
with a qualified "no" on their request, OK?

Mary

Mahnaz Mansourpour wrote:
> All,
>
> I know, I was not cc'd on their original email to Ed so I was not 
> aware what they want to do. I felt uncomfortable just talking to them 
> from emails and phone calls without giving me clear idea of what they 
> want to do.
>
> As of right now the will not be getting trained on the spray coater , 
> who likes to break the news to them?
> secondly, how people get so far in the process without staff having a 
> clear idea?
>
>
> mahnaz
>
>
> On 11/19/2010 9:06 AM, Mary Tang wrote:
>> Hi Mahnaz and SpecMat --
>>
>> Our current guideline is that we don't allow processing involving 
>> nanoparticle dispersals in the fab.  The problem is that aerosols, 
>> whether they come from off-spray during spin coating or ultrasonic 
>> nebulization in spray coating, will be easily carried by air flows 
>> and stick to the first surface they contact.  They will also be 
>> incredibly difficult to remove.
>>
>> The exception is latex spheres (i.e. polystyrene beads) -- the reason 
>> is that normal resist removal processing will get rid of these easily.
>>
>> Contamination by conductive and magnetic nanoparticles (including 
>> "magnabeads"), however, can really screw up someone else's experiments.
>>
>> So, going by this guideline, my recommendation is to say "no" to this 
>> request.  We could refer them directly to EV or Suss as those 
>> companies might be willing to collaborate with them.
>>
>> By the way, we need to watch for this group -- Ed, Maureen, and I 
>> have found them to be quite dishonest in their dealings with us so 
>> far.  If you tell them "No" it needs to be clear and not open to 
>> "misinterpretation."
>>
>>
>> Mary
>>
>>
>>
>> Mahnaz Mansourpour wrote:
>>>
>>> I am sending this to see what does every one thinks?
>>> Originally before they become lab members I had told them that I am 
>>> not open to run things of this nature.
>>>
>>> mahnaz
>>>
>>> -------- Original Message --------
>>> Subject: 	Re: SNF training on EVG 101 Resist spray coater
>>> Date: 	Thu, 18 Nov 2010 17:04:11 -0800
>>> From: 	Mike Young <mike.young at innovadynamics.com>
>>> To: 	Mahnaz Mansourpour <mahnaz at stanford.edu>
>>> CC: 	Matthew Robinson <matt at innovadynamics.com>
>>>
>>>
>>>
>>> Mahnaz,
>>>
>>> Is it possible to spray a resist, coating, and/or solvent containing 
>>> silver nanoparticles through the tool?  If we do spray these, we can 
>>> run a lot of solvent through each time after use to clean the parts, 
>>> or we could buy our own nozzles and hoses that are will be metal 
>>> contaminated and interchange parts when we use the tool.
>>>
>>> When is the next training session for the spray coater? 
>>>
>>> Mike
>>>
>>> On Thu, Nov 18, 2010 at 3:49 PM, Mahnaz Mansourpour 
>>> <mahnaz at stanford.edu <mailto:mahnaz at stanford.edu>> wrote:
>>>
>>>     Hi Mike,
>>>
>>>     I think that I have mentioned to you the spray coater is here
>>>     and few of us have been working on it diligently
>>>     but with more than a 10 variables on the system we do not have a
>>>     standard recipe per say to offer every individual.
>>>     so tell me what is it that you want and like to suggest???
>>>
>>>     mahnaz
>>>
>>>
>>>     On 11/17/2010 9:39 PM, Mike Young wrote:
>>>>     Hi Mahnaz,
>>>>
>>>>     Matt and I have passed Uli's litho training class.  When is the
>>>>     next training session for the spray coater?  
>>>>
>>>>     Besides resist, what other materials may be sprayed through the
>>>>     tool?  
>>>>
>>>>     Is there a listing of items purchasable at the SNF store posted
>>>>     somewhere? 
>>>>
>>>>     --
>>>>     Mike Young
>>>>     Director of Technology Development
>>>>     Innova Dynamics
>>>>     office: 415.692.5410
>>>>     fax: 415.796.6445
>>>>     www.innovadynamics.com <http://www.innovadynamics.com>
>>>>     1700 Owens Street, Suite 240
>>>>     San Francisco, CA 94158 
>>>>
>>>>
>>>>
>>>>     On Tue, Nov 2, 2010 at 9:14 AM, Mike Young
>>>>     <mike.young at innovadynamics.com
>>>>     <mailto:mike.young at innovadynamics.com>> wrote:
>>>>
>>>>         Hi Mahnaz,
>>>>
>>>>         Matt and I are from Innova Dynamics and are industrial
>>>>         users of the SNF.  We would like to receive training on
>>>>         the EVG 101 Resist spray coater.  Are you available to
>>>>         train one or both of us 11/5, 11/8 or 11/12?  
>>>>
>>>>         --
>>>>         Mike Young
>>>>         Director of Technology Development
>>>>         Innova Dynamics
>>>>         office: 415.692.5410
>>>>         mobile: 267.566.3574
>>>>         fax: 415.796.6445
>>>>         www.innovadynamics.com <http://www.innovadynamics.com>
>>>>         1700 Owens Street, Suite 240
>>>>         San Francisco, CA 94158 
>>>>
>>>>
>>>
>>>
>>
>>
>> -- 
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA  94305
>> (650)723-9980
>> mtang at stanford.edu
>> http://snf.stanford.edu
>>     


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20101122/a0ef1a16/attachment.html>

From edmyers at stanford.edu  Mon Nov 22 08:40:18 2010
From: edmyers at stanford.edu (Ed Myers)
Date: Mon, 22 Nov 2010 08:40:18 -0800
Subject: Fwd: Re: SNF training on EVG 101 Resist spray coater
In-Reply-To: <4CEA9C1B.4020306@stanford.edu>
References: <4CE6AB3A.4050504@stanford.edu>
 <4CE6AEB1.1070508@stanford.edu>
 <4CEA9998.3000401@stanford.edu>
 <4CEA9C1B.4020306@stanford.edu>
Message-ID: <6.2.5.6.2.20101122083837.052527c8@stanford.edu>

Mary,

I will contact them.  They did mention the spray coater, but as 
"seeing how it would coat their structures."  This seems like a 
cognitive misinformation.

Ed



At 08:36 AM 11/22/2010, Mary Tang wrote:
>Hi all --
>
>I don't believe they mentioned potential use of the EV spraycoater 
>at all until this request.  So, unless anyone says otherwise, I'll 
>respond with a qualified "no" on their request, OK?
>
>Mary
>
>Mahnaz Mansourpour wrote:
>>All,
>>
>>I know, I was not cc'd on their original email to Ed so I was not 
>>aware what they want to do. I felt uncomfortable just talking to 
>>them from emails and phone calls without giving me clear idea of 
>>what they want to do.
>>
>>As of right now the will not be getting trained on the spray coater 
>>, who likes to break the news to them?
>>secondly, how people get so far in the process without staff having 
>>a clear idea?
>>
>>
>>mahnaz
>>
>>
>>On 11/19/2010 9:06 AM, Mary Tang wrote:
>>>Hi Mahnaz and SpecMat --
>>>
>>>Our current guideline is that we don't allow processing involving 
>>>nanoparticle dispersals in the fab.  The problem is that aerosols, 
>>>whether they come from off-spray during spin coating or ultrasonic 
>>>nebulization in spray coating, will be easily carried by air flows 
>>>and stick to the first surface they contact.  They will also be 
>>>incredibly difficult to remove.
>>>
>>>The exception is latex spheres (i.e. polystyrene beads) -- the 
>>>reason is that normal resist removal processing will get rid of these easily.
>>>
>>>Contamination by conductive and magnetic nanoparticles (including 
>>>"magnabeads"), however, can really screw up someone else's experiments.
>>>
>>>So, going by this guideline, my recommendation is to say "no" to 
>>>this request.  We could refer them directly to EV or Suss as those 
>>>companies might be willing to collaborate with them.
>>>
>>>By the way, we need to watch for this group -- Ed, Maureen, and I 
>>>have found them to be quite dishonest in their dealings with us so 
>>>far.  If you tell them "No" it needs to be clear and not open to 
>>>"misinterpretation."
>>>
>>>
>>>Mary
>>>
>>>
>>>
>>>Mahnaz Mansourpour wrote:
>>>>
>>>>I am sending this to see what does every one thinks?
>>>>Originally before they become lab members I had told them that I 
>>>>am not open to run things of this nature.
>>>>
>>>>mahnaz
>>>>
>>>>-------- Original Message --------
>>>>Subject: Re: SNF training on EVG 101 Resist spray coater
>>>>Date: Thu, 18 Nov 2010 17:04:11 -0800
>>>>From: Mike Young 
>>>><mailto:mike.young at innovadynamics.com><mike.young at innovadynamics.com>
>>>>To: Mahnaz Mansourpour <mailto:mahnaz at stanford.edu><mahnaz at stanford.edu>
>>>>CC: Matthew Robinson 
>>>><mailto:matt at innovadynamics.com><matt at innovadynamics.com>
>>>>
>>>>
>>>>Mahnaz,
>>>>
>>>>Is it possible to spray a resist, coating, and/or solvent 
>>>>containing silver nanoparticles through the tool?  If we do spray 
>>>>these, we can run a lot of solvent through each time after use to 
>>>>clean the parts, or we could buy our own nozzles and hoses that 
>>>>are will be metal contaminated and interchange parts when we use the tool.
>>>>
>>>>When is the next training session for the spray coater?
>>>>
>>>>Mike
>>>>
>>>>On Thu, Nov 18, 2010 at 3:49 PM, Mahnaz Mansourpour 
>>>><<mailto:mahnaz at stanford.edu>mahnaz at stanford.edu> wrote:
>>>>Hi Mike,
>>>>
>>>>I think that I have mentioned to you the spray coater is here and 
>>>>few of us have been working on it diligently
>>>>but with more than a 10 variables on the system we do not have a 
>>>>standard recipe per say to offer every individual.
>>>>so tell me what is it that you want and like to suggest???
>>>>
>>>>mahnaz
>>>>
>>>>
>>>>On 11/17/2010 9:39 PM, Mike Young wrote:
>>>>>Hi Mahnaz,
>>>>>
>>>>>Matt and I have passed Uli's litho training class.  When is the 
>>>>>next training session for the spray coater?
>>>>>
>>>>>Besides resist, what other materials may be sprayed through the tool?
>>>>>
>>>>>Is there a listing of items purchasable at the SNF store posted 
>>>>>somewhere?
>>>>>
>>>>>--
>>>>>Mike Young
>>>>>Director of Technology Development
>>>>>Innova Dynamics
>>>>>office: 415.692.5410
>>>>>fax: 415.796.6445
>>>>><http://www.innovadynamics.com>www.innovadynamics.com
>>>>>1700 Owens Street, Suite 240
>>>>>San Francisco, CA 94158
>>>>>
>>>>>
>>>>>
>>>>>On Tue, Nov 2, 2010 at 9:14 AM, Mike Young 
>>>>><<mailto:mike.young at innovadynamics.com>mike.young at innovadynamics.com> wrote:
>>>>>Hi Mahnaz,
>>>>>
>>>>>Matt and I are from Innova Dynamics and are industrial users of 
>>>>>the SNF.  We would like to receive training on the EVG 101 
>>>>>Resist spray coater.  Are you available to train one or both of 
>>>>>us 11/5, 11/8 or 11/12?
>>>>>
>>>>>--
>>>>>Mike Young
>>>>>Director of Technology Development
>>>>>Innova Dynamics
>>>>>office: 415.692.5410
>>>>>mobile: 267.566.3574
>>>>>fax: 415.796.6445
>>>>><http://www.innovadynamics.com>www.innovadynamics.com
>>>>>1700 Owens Street, Suite 240
>>>>>San Francisco, CA 94158
>>>>>
>>>>
>>>
>>>
>>>
>>>--
>>>Mary X. Tang, Ph.D.
>>>Stanford Nanofabrication Facility
>>>CIS Room 136, Mail Code 4070
>>>Stanford, CA  94305
>>>(650)723-9980
>>><mailto:mtang at stanford.edu>mtang at stanford.edu
>>>http://snf.stanford.edu
>>>
>
>
>
>--
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA  94305
>(650)723-9980
><mailto:mtang at stanford.edu>mtang at stanford.edu
>http://snf.stanford.edu




From edmyers at stanford.edu  Mon Nov 22 10:12:45 2010
From: edmyers at stanford.edu (Ed Myers)
Date: Mon, 22 Nov 2010 10:12:45 -0800
Subject: Fwd: Re: SNF training on EVG 101 Resist spray coater
In-Reply-To: <4CEA9998.3000401@stanford.edu>
References: <4CE6AB3A.4050504@stanford.edu>
 <4CE6AEB1.1070508@stanford.edu>
 <4CEA9998.3000401@stanford.edu>
Message-ID: <6.2.5.6.2.20101122100046.0521db10@stanford.edu>

Mike and Matthew,

Your request to spray coat nanoparticles has been denied.  We have 
strict regulations on the use of nanoparticles in our facility and 
this approach is outside of acceptable procedures.

As your technical liaison, I am disappointed that this did not come 
up in our discussions.  This is exactly the reason we require 
discussions with a technical liaison and we require an openness as to 
your objectives in the facility.  I could have easily answered this 
question during our discussion.  Since this information was not 
reveled during the technical liaison discussions we are now compelled 
to hold off trainings until we have a clear understanding of your objectives.

Please contact me and provide me with clearer objectives and 
requirements for our facility.

Regards,
Ed Myers


>>>-------- Original Message --------
>>>Subject: Re: SNF training on EVG 101 Resist spray coater
>>>Date: Thu, 18 Nov 2010 17:04:11 -0800
>>>From: Mike Young 
>>><mailto:mike.young at innovadynamics.com><mike.young at innovadynamics.com>
>>>To: Mahnaz Mansourpour <mailto:mahnaz at stanford.edu><mahnaz at stanford.edu>
>>>CC: Matthew Robinson 
>>><mailto:matt at innovadynamics.com><matt at innovadynamics.com>
>>>
>>>
>>>Mahnaz,
>>>
>>>Is it possible to spray a resist, coating, and/or solvent 
>>>containing silver nanoparticles through the tool?  If we do spray 
>>>these, we can run a lot of solvent through each time after use to 
>>>clean the parts, or we could buy our own nozzles and hoses that 
>>>are will be metal contaminated and interchange parts when we use the tool.
>>>
>>>When is the next training session for the spray coater?
>>>
>>>Mike
>>>
>>>On Thu, Nov 18, 2010 at 3:49 PM, Mahnaz Mansourpour 
>>><<mailto:mahnaz at stanford.edu>mahnaz at stanford.edu> wrote:
>>>Hi Mike,
>>>
>>>I think that I have mentioned to you the spray coater is here and 
>>>few of us have been working on it diligently
>>>but with more than a 10 variables on the system we do not have a 
>>>standard recipe per say to offer every individual.
>>>so tell me what is it that you want and like to suggest???
>>>
>>>mahnaz
>>>
>>>
>>>On 11/17/2010 9:39 PM, Mike Young wrote:
>>>>Hi Mahnaz,
>>>>
>>>>Matt and I have passed Uli's litho training class.  When is the 
>>>>next training session for the spray coater?
>>>>
>>>>Besides resist, what other materials may be sprayed through the tool?
>>>>
>>>>Is there a listing of items purchasable at the SNF store posted somewhere?
>>>>
>>>>--
>>>>Mike Young
>>>>Director of Technology Development
>>>>Innova Dynamics
>>>>office: 415.692.5410
>>>>fax: 415.796.6445
>>>><http://www.innovadynamics.com>www.innovadynamics.com
>>>>1700 Owens Street, Suite 240
>>>>San Francisco, CA 94158
>>>>
>>>>
>>>>
>>>>On Tue, Nov 2, 2010 at 9:14 AM, Mike Young 
>>>><<mailto:mike.young at innovadynamics.com>mike.young at innovadynamics.com> wrote:
>>>>Hi Mahnaz,
>>>>
>>>>Matt and I are from Innova Dynamics and are industrial users of 
>>>>the SNF.  We would like to receive training on the EVG 101 Resist 
>>>>spray coater.  Are you available to train one or both of us 11/5, 
>>>>11/8 or 11/12?
>>>>
>>>>--
>>>>Mike Young
>>>>Director of Technology Development
>>>>Innova Dynamics
>>>>office: 415.692.5410
>>>>mobile: 267.566.3574
>>>>fax: 415.796.6445
>>>><http://www.innovadynamics.com>www.innovadynamics.com
>>>>1700 Owens Street, Suite 240
>>>>San Francisco, CA 94158
>>>>
>>>
>>
>>
>>
>>--
>>Mary X. Tang, Ph.D.
>>Stanford Nanofabrication Facility
>>CIS Room 136, Mail Code 4070
>>Stanford, CA  94305
>>(650)723-9980
>><mailto:mtang at stanford.edu>mtang at stanford.edu
>>http://snf.stanford.edu