Looking to spin coat a 'binder' on a wafer, need approval to bring chemical into SNF
mtang at stanford.edu
Sat Nov 13 06:50:58 PST 2010
Hi Nathan --
Thanks for the info -- the spin coater in the saw room is definitely the
right place to do this - and thanks for storing in your own lab. A
couple of questions. First, will you be diluting or mixing this
material? If so, with what? Also, I'm a little concerned that some of
the chemicals may be absorbed in the teflon housing. Mahnaz has found
that there are liners for the coater bowl -- could you please follow up
with her about them? Or we might brainstorm ideas on how to line the bowl.
There's a programmable hot plate in the saw room -- we'll just need to
make sure it's under the hood when you use it (I can show you how to set
Please get in touch with Mahnaz or me to show you how to use the coater.
On 11/12/2010 2:36 PM, Nathan Salowitz wrote:
> I'm seeking permission to bring this binder into the SNF area
> (MSDS attached).
> The intent is to spin coat the binder onto wafers & dry it at 100C
> for 5 min on a hot plate. Binder burn out will be performed in my own
> This process does not need to be in the clean room, using the spin
> coater near the wafer saw is perfectly acceptable.
> I intend to store the binder in my own lab.
> Please let me know if this is ok.
More information about the specmat