Copper Etching

Mary Tang mtang at
Wed Oct 13 18:28:47 PDT 2010

Hi Kaveh --

Thanks -- and sorry, I thought you were talking about a FeCl3-based 
etchant, but this has only ammonium persulfate and water.  This should 
be fine for use at wbgeneral.  When the material arrives, please store 
it in the chemicals passthrough, in the personal chemicals area.  Make 
sure to get a yellow label and barcode from Mahnaz.  If it is a small 
bottle, please place inside a larger bottle carrier and label the 
outside of the bottle carrier (this will discourage anyone from putting 
another small bottle of something incompatible next to it.)  And because 
your waste contains heavy metals, please collect used etchant and the 
first couple of rinsates in a compatible container and label for 
hazardous waste disposal.  I'm not sure about compatibility, so would 
recommend using a glass container for waste collection just to be on the 
safe side.


Kaveh Milaninia wrote:
> I'd like to wet-etch some copper foils at wbgen. The copper etchant will
> come pre-mixed from Transene. The MSDS is attached to this email. Please
> let me know if you require any further information.
> Kaveh

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

More information about the specmat mailing list