ALD ALR

J Provine jprovine at stanford.edu
Fri Oct 15 17:52:54 PDT 2010


john,
all lines on the system are currently being used.  it doesn't have to be the
ammonia bottle.  it could be one of the organo-metallic precursors (h2o is
no good because it is to be used for in situ etching of the GeOx that is
formed).
i chose the ammonia bottle because it has two valves for double shut off and
already has the needle valve and doesn't utilize a heater jacket.

so changing to another line (other than h2o) is fine, but it just trades
ammonia for an organo-metallic precursor.

j

On Fri, Oct 15, 2010 at 5:34 PM, John Shott <shott at stanford.edu> wrote:

>  J:
>
> Swapping ammonia bottles on a per-run basis makes me somewhat nervous.  Am
> I correct in thinking that, at the moment, the Savannah is not using all of
> its metallorganic "slots"?  Rather than breaking into the ammonia line, is
> there a reason that one of the other channels that has a currently-unused
> ALD valve, can't be used for the oxygen injection needle valve?  In that
> way, there would be no hardware changes required between runs, the ammonia
> line doesn't need to be disturbed at all, and selection of oxygen vs.
> ammonia is controlled by the recipe.
>
> What am I missing?
>
> Thanks,
>
> John
>
>
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