ALD ALR

J Provine jprovine at stanford.edu
Wed Oct 20 06:39:31 PDT 2010


john et al,
any further thoughts on this project?
j

On Fri, Oct 15, 2010 at 5:52 PM, J Provine <jprovine at stanford.edu> wrote:

> john,
> all lines on the system are currently being used.  it doesn't have to be
> the ammonia bottle.  it could be one of the organo-metallic precursors (h2o
> is no good because it is to be used for in situ etching of the GeOx that is
> formed).
> i chose the ammonia bottle because it has two valves for double shut off
> and already has the needle valve and doesn't utilize a heater jacket.
>
> so changing to another line (other than h2o) is fine, but it just trades
> ammonia for an organo-metallic precursor.
>
> j
>
>
> On Fri, Oct 15, 2010 at 5:34 PM, John Shott <shott at stanford.edu> wrote:
>
>>  J:
>>
>> Swapping ammonia bottles on a per-run basis makes me somewhat nervous.  Am
>> I correct in thinking that, at the moment, the Savannah is not using all of
>> its metallorganic "slots"?  Rather than breaking into the ammonia line, is
>> there a reason that one of the other channels that has a currently-unused
>> ALD valve, can't be used for the oxygen injection needle valve?  In that
>> way, there would be no hardware changes required between runs, the ammonia
>> line doesn't need to be disturbed at all, and selection of oxygen vs.
>> ammonia is controlled by the recipe.
>>
>> What am I missing?
>>
>> Thanks,
>>
>> John
>>
>>
>
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