[Fwd: LGA Al films]

Mary Tang mtang at stanford.edu
Wed Oct 20 09:32:19 PDT 2010


Hi all --

What do you think?  (Ed?)

M

-------- Original Message --------
Subject: 	LGA Al films
Date: 	Wed, 20 Oct 2010 08:55:13 -0700
From: 	Richard Yeh <yeh at alcestech.com>
To: 	Mary Tang <mtang at stanford.edu>



Hi Mary,

Our gryphon tool currently has a pressure stability problem and I'm 
thinking of outsourcing a thin Al dep step to LGA 
(http://www.lgafilms.com/).  After the Al dep, I'd like to pattern that 
at SNF.  Does SNF consider LGA processed wafers CMOS clean?  I'd like to 
make sure I don't contaminate clean tools.

Thanks,
Richard

-- 
Alces Technology
PO Box 11180
Jackson, WY 83002
(510) 299-2377 Mobile
(408) 716-8242 Office (California)
(307) 732-1994x7 Office (Wyoming)




-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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