[Fwd: LGA Al films]

Mary Tang mtang at stanford.edu
Wed Oct 20 09:50:07 PDT 2010


Richard also asks if there is an already-qualified place for Al dep.  
Recommendations?

M

Mary Tang wrote:
> Hi all --
>
> What do you think?  (Ed?)
>
> M
>
> -------- Original Message --------
> Subject:     LGA Al films
> Date:     Wed, 20 Oct 2010 08:55:13 -0700
> From:     Richard Yeh <yeh at alcestech.com>
> To:     Mary Tang <mtang at stanford.edu>
>
>
>
> Hi Mary,
>
> Our gryphon tool currently has a pressure stability problem and I'm 
> thinking of outsourcing a thin Al dep step to LGA 
> (http://www.lgafilms.com/).  After the Al dep, I'd like to pattern 
> that at SNF.  Does SNF consider LGA processed wafers CMOS clean?  I'd 
> like to make sure I don't contaminate clean tools.
>
> Thanks,
> Richard
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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