[Fwd: LGA Al films]

Ed Myers edmyers at stanford.edu
Wed Oct 20 10:12:25 PDT 2010


All,

In the past LGA has been considered gold contaminated.

Ed

At 09:32 AM 10/20/2010, Mary Tang wrote:
>Hi all --
>
>What do you think?  (Ed?)
>
>M
>
>-------- Original Message --------
>Subject:        LGA Al films
>Date:   Wed, 20 Oct 2010 08:55:13 -0700
>From:   Richard Yeh <yeh at alcestech.com>
>To:     Mary Tang <mtang at stanford.edu>
>
>
>
>Hi Mary,
>
>Our gryphon tool currently has a pressure stability problem and I'm 
>thinking of outsourcing a thin Al dep step to LGA 
>(http://www.lgafilms.com/).  After the Al dep, I'd like to pattern 
>that at SNF.  Does SNF consider LGA processed wafers CMOS 
>clean?  I'd like to make sure I don't contaminate clean tools.
>
>Thanks,
>Richard
>
>--
>Alces Technology
>PO Box 11180
>Jackson, WY 83002
>(510) 299-2377 Mobile
>(408) 716-8242 Office (California)
>(307) 732-1994x7 Office (Wyoming)
>
>
>
>
>--
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA  94305
>(650)723-9980
>mtang at stanford.edu
>http://snf.stanford.edu





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