SpecMat Request for sts

Fatih Sarioglu sarioglu at stanford.edu
Thu Oct 28 14:42:21 PDT 2010

  Dear Sir/Madam,

After talking to Jeannie Perez and Nancy Latta, I was asked to submit a 
request for the following process.

I would like to learn if my wafers are acceptable in ksbonder and clean 
oxidation furnaces after a deposition in sts. I would like to use sts to 
deposit PECVD nitride film following a decontamination process. Rest of 
my process involves use of of clean tools such as oxidation furnaces 
(thermco 1&2) and ksbonder. After these steps, the nitride film will be 


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