jprovine at stanford.edu
Tue Sep 14 21:51:29 PDT 2010
what are the numbers associated with clean and semi-clean status in the snf.
ie what density of trace contaminants are allowed? i tried to find this
information on the snf website but to no success. i remember some of these
numbers being presented at a clean-tamination meeting last year.
for instance, two questions have arisen recently concerning the savannah:
1) clean wafer goes in...how can we verify that it is clean or semi-clean
coming out? what number do we need to hit with TXRF or other methods.
2) a user can purchase W with "low alkali content" from a company. they
promise <20ppm of alkalis in the W filament (most of the contamination is
likely K). is that semi-clean?
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