[Fwd: QuSwami SpecMat request 9/21/10]

Mary Tang mtang at stanford.edu
Tue Sep 21 13:48:34 PDT 2010

 From Attila, now at QuSwami.  Any concerns?

-------- Original Message --------
Subject: 	QuSwami SpecMat request 9/21/10
Date: 	Tue, 21 Sep 2010 09:16:53 -0700
From: 	Attila Horvath <horvattila at gmail.com>
To: 	mtang at snf.stanford.edu

Dear SpecMat Committee,
We are planning to complete some processing steps at the Berkeley 
Marvell Lab on our wafers. Our entire process flow would start with some 
process steps here at SNF followed by some steps at Berkeley and back to 
SNF again. I met with Bill Flounders last week, we talked through our 
process plan, and we received a green light from him to proceed with the 
wafers that have gone through the initial process steps here at SNF. Now 
I turn to you asking for acceptance of our wafers processed at 
the Marvell Lab on the following equipments:
- P-5000 TEOS oxide deposition -- semi-clean (absolutely no gold or silver)
- Litho equipments (primeoven, svgcoat2, ksaligner, svgdev, bake oven) - 
no restrictions on materials (similar to SNF rules)
- HF dip - general wet bench using our own lab ware, or Msink8 (semi-clean)
- PR strip in Matrix - semi-clean
Following these process steps at Marvell we'd like to return to SNF and 
be accepted in the semi-clean category. Please let us know about your 
decision or possible concerns. We would like to start this pilot run at 
the Marvell Lab at the beginning of October.
Thank you and best regards,
Attila Horvath

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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