[Fwd: QuSwami SpecMat request 9/21/10]

Mary Tang mtang at stanford.edu
Thu Sep 23 08:16:48 PDT 2010

Hi all --

I'll go ahead and OK this for Attila, unless there are any concerns?  
The semiclean tool he wants, by the way, is the Savannah ALD -- these 
are 4" wafers that he will perform a standard SNF clean on before 
processing.  Afterwards, they go into metal dep tools.


Mary Tang wrote:
> From Attila, now at QuSwami.  Any concerns?
> -------- Original Message --------
> Subject:     QuSwami SpecMat request 9/21/10
> Date:     Tue, 21 Sep 2010 09:16:53 -0700
> From:     Attila Horvath <horvattila at gmail.com>
> To:     mtang at snf.stanford.edu
> Dear SpecMat Committee,
> We are planning to complete some processing steps at the Berkeley 
> Marvell Lab on our wafers. Our entire process flow would start with 
> some process steps here at SNF followed by some steps at Berkeley and 
> back to SNF again. I met with Bill Flounders last week, we talked 
> through our process plan, and we received a green light from him to 
> proceed with the wafers that have gone through the initial process 
> steps here at SNF. Now I turn to you asking for acceptance of our 
> wafers processed at the Marvell Lab on the following equipments:
> - P-5000 TEOS oxide deposition -- semi-clean (absolutely no gold or 
> silver)
> - Litho equipments (primeoven, svgcoat2, ksaligner, svgdev, bake oven) 
> - no restrictions on materials (similar to SNF rules)
> - HF dip - general wet bench using our own lab ware, or Msink8 
> (semi-clean)
> - PR strip in Matrix - semi-clean
> Following these process steps at Marvell we'd like to return to SNF 
> and be accepted in the semi-clean category. Please let us know about 
> your decision or possible concerns. We would like to start this pilot 
> run at the Marvell Lab at the beginning of October.
> Thank you and best regards,
> Attila Horvath

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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