[Fwd: QuSwami SpecMat request 9/21/10]
edmyers at stanford.edu
Thu Sep 23 09:20:22 PDT 2010
I am not as concerned about the contamination aspects but as to why
they feel the need to move to Berkeley.
At 08:16 AM 9/23/2010, Mary Tang wrote:
>Hi all --
>I'll go ahead and OK this for Attila, unless there are any concerns?
>The semiclean tool he wants, by the way, is the Savannah ALD --
>these are 4" wafers that he will perform a standard SNF clean on
>before processing. Afterwards, they go into metal dep tools.
>Mary Tang wrote:
>> From Attila, now at QuSwami. Any concerns?
>>-------- Original Message --------
>>Subject: QuSwami SpecMat request 9/21/10
>>Date: Tue, 21 Sep 2010 09:16:53 -0700
>>From: Attila Horvath <horvattila at gmail.com>
>>To: mtang at snf.stanford.edu
>>Dear SpecMat Committee,
>>We are planning to complete some processing steps at the Berkeley
>>Marvell Lab on our wafers. Our entire process flow would start with
>>some process steps here at SNF followed by some steps at Berkeley
>>and back to SNF again. I met with Bill Flounders last week, we
>>talked through our process plan, and we received a green light from
>>him to proceed with the wafers that have gone through the initial
>>process steps here at SNF. Now I turn to you asking for acceptance
>>of our wafers processed at the Marvell Lab on the following equipments:
>>- P-5000 TEOS oxide deposition -- semi-clean (absolutely no gold or silver)
>>- Litho equipments (primeoven, svgcoat2, ksaligner, svgdev, bake
>>oven) - no restrictions on materials (similar to SNF rules)
>>- HF dip - general wet bench using our own lab ware, or Msink8 (semi-clean)
>>- PR strip in Matrix - semi-clean
>>Following these process steps at Marvell we'd like to return to SNF
>>and be accepted in the semi-clean category. Please let us know
>>about your decision or possible concerns. We would like to start
>>this pilot run at the Marvell Lab at the beginning of October.
>>Thank you and best regards,
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA 94305
>mtang at stanford.edu
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