[Fwd: QuSwami SpecMat request 9/21/10]

Mary Tang mtang at stanford.edu
Thu Sep 23 09:39:58 PDT 2010


Attila lives in Berkeley so wants to arrange the processing to minimize 
commuting.  And they need the Berkeley plasma TEOS for their process.

M

Ed Myers wrote:
> All,
>
> I am not as concerned about the contamination aspects but as to why 
> they feel the need to move to Berkeley.
>
> Ed
>
>
> At 08:16 AM 9/23/2010, Mary Tang wrote:
>> Hi all --
>>
>> I'll go ahead and OK this for Attila, unless there are any concerns?
>> The semiclean tool he wants, by the way, is the Savannah ALD -- these 
>> are 4" wafers that he will perform a standard SNF clean on before 
>> processing.  Afterwards, they go into metal dep tools.
>>
>> Mary
>>
>> Mary Tang wrote:
>>> From Attila, now at QuSwami.  Any concerns?
>>>
>>> -------- Original Message --------
>>> Subject:     QuSwami SpecMat request 9/21/10
>>> Date:     Tue, 21 Sep 2010 09:16:53 -0700
>>> From:     Attila Horvath <horvattila at gmail.com>
>>> To:     mtang at snf.stanford.edu
>>>
>>>
>>>
>>> Dear SpecMat Committee,
>>>
>>> We are planning to complete some processing steps at the Berkeley 
>>> Marvell Lab on our wafers. Our entire process flow would start with 
>>> some process steps here at SNF followed by some steps at Berkeley 
>>> and back to SNF again. I met with Bill Flounders last week, we 
>>> talked through our process plan, and we received a green light from 
>>> him to proceed with the wafers that have gone through the initial 
>>> process steps here at SNF. Now I turn to you asking for acceptance 
>>> of our wafers processed at the Marvell Lab on the following equipments:
>>>
>>> - P-5000 TEOS oxide deposition -- semi-clean (absolutely no gold or 
>>> silver)
>>> - Litho equipments (primeoven, svgcoat2, ksaligner, svgdev, bake 
>>> oven) - no restrictions on materials (similar to SNF rules)
>>> - HF dip - general wet bench using our own lab ware, or Msink8 
>>> (semi-clean)
>>> - PR strip in Matrix - semi-clean
>>>
>>> Following these process steps at Marvell we'd like to return to SNF 
>>> and be accepted in the semi-clean category. Please let us know about 
>>> your decision or possible concerns. We would like to start this 
>>> pilot run at the Marvell Lab at the beginning of October.
>>>
>>> Thank you and best regards,
>>> Attila Horvath
>>>
>>
>>
>> -- 
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA  94305
>> (650)723-9980
>> mtang at stanford.edu
>> http://snf.stanford.edu
>
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




More information about the specmat mailing list