[Fwd: QuSwami SpecMat request 9/21/10]
mtang at stanford.edu
Thu Sep 23 09:39:58 PDT 2010
Attila lives in Berkeley so wants to arrange the processing to minimize
commuting. And they need the Berkeley plasma TEOS for their process.
Ed Myers wrote:
> I am not as concerned about the contamination aspects but as to why
> they feel the need to move to Berkeley.
> At 08:16 AM 9/23/2010, Mary Tang wrote:
>> Hi all --
>> I'll go ahead and OK this for Attila, unless there are any concerns?
>> The semiclean tool he wants, by the way, is the Savannah ALD -- these
>> are 4" wafers that he will perform a standard SNF clean on before
>> processing. Afterwards, they go into metal dep tools.
>> Mary Tang wrote:
>>> From Attila, now at QuSwami. Any concerns?
>>> -------- Original Message --------
>>> Subject: QuSwami SpecMat request 9/21/10
>>> Date: Tue, 21 Sep 2010 09:16:53 -0700
>>> From: Attila Horvath <horvattila at gmail.com>
>>> To: mtang at snf.stanford.edu
>>> Dear SpecMat Committee,
>>> We are planning to complete some processing steps at the Berkeley
>>> Marvell Lab on our wafers. Our entire process flow would start with
>>> some process steps here at SNF followed by some steps at Berkeley
>>> and back to SNF again. I met with Bill Flounders last week, we
>>> talked through our process plan, and we received a green light from
>>> him to proceed with the wafers that have gone through the initial
>>> process steps here at SNF. Now I turn to you asking for acceptance
>>> of our wafers processed at the Marvell Lab on the following equipments:
>>> - P-5000 TEOS oxide deposition -- semi-clean (absolutely no gold or
>>> - Litho equipments (primeoven, svgcoat2, ksaligner, svgdev, bake
>>> oven) - no restrictions on materials (similar to SNF rules)
>>> - HF dip - general wet bench using our own lab ware, or Msink8
>>> - PR strip in Matrix - semi-clean
>>> Following these process steps at Marvell we'd like to return to SNF
>>> and be accepted in the semi-clean category. Please let us know about
>>> your decision or possible concerns. We would like to start this
>>> pilot run at the Marvell Lab at the beginning of October.
>>> Thank you and best regards,
>>> Attila Horvath
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA 94305
>> mtang at stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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