[Fwd: Unity material/request for removal from gold contaminated status]

Mary Tang mtang at stanford.edu
Fri Sep 24 11:50:31 PDT 2010

Hi all --

Have any of you spoken with Unity about this?  I did have an exchange 
with Lidia (which I will forward to you all shortly) which touched on 
this, but certainly didn't include any mention of ALD use or these other 

It's not clear to me exactly which steps they want to use ALD or 
P5000etch for.  Does anyone have more info?


-------- Original Message --------
Subject: 	Unity material/request for removal from gold contaminated status
Date: 	Fri, 24 Sep 2010 11:36:05 -0700
From: 	Lidia Vereen <lvereen at unitysemi.com>
Reply-To: 	<lvereen at unitysemi.com>
Organization: 	Unity Semiconductor Corporation
To: 	'Mary Tang' <mtang at stanford.edu>
CC: 	<efriend at unitysemi.com>, "'Mary Calarrudo'" <mcalarrudo at unitysemi.com>
References: 	<4C979995.8090105 at stanford.edu>


Please find enclosed the presentation/data/request for Unity to be removed
from the gold contaminated list.  I do not have the specmat email address
and am hoping you can forward the email to that distribution.   Please let
me know if there are questions regarding the material and how long before we
can get resolution.



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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