GaN?

Mary Tang mtang at stanford.edu
Sat Apr 2 07:49:49 PDT 2011


Yes.  GaN is a stable material.  However, the etch chemistry needs to be 
considered.  Most common GaN wet etchants are standard lab chemicals.  
However, some chemistries we should not allow, for example, potassium 
persulfate.  So, if someone submits a request to wet etch GaN, make sure 
they also check with you on the chemicals and procedures.

Mary

On 4/1/2011 9:29 AM, Uli Thumser wrote:
> Are Gallium Nitride (GaN) wafers allowed at the wbgen?
> Uli




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