mtang at stanford.edu
Sat Apr 2 07:49:49 PDT 2011
Yes. GaN is a stable material. However, the etch chemistry needs to be
considered. Most common GaN wet etchants are standard lab chemicals.
However, some chemistries we should not allow, for example, potassium
persulfate. So, if someone submits a request to wet etch GaN, make sure
they also check with you on the chemicals and procedures.
On 4/1/2011 9:29 AM, Uli Thumser wrote:
> Are Gallium Nitride (GaN) wafers allowed at the wbgen?
More information about the specmat