question of LPCVD dopant concentration

Yan Yao yanyao at stanford.edu
Sat Apr 2 11:57:58 PDT 2011


Hi all,

I have a question about the concentration of doping gas in using
Thermocopoly 1 and 2. Understanding this clearly would enable me to
select the dopant flow rate correctly.

In the case of P620B2H6 recipe with B2H6 5 sccm, what would be SiH4
flow rate? Is SiH4 100% pure or diluted in Ar gas? Is B2H6 diluted is
Ar as well? If yes, what the ratio of dilution?

Thanks for help!

Yan

-- 
Yan Yao, Ph.D
Stanford Postdoc Scholar
476 Lomita Mall, McCullough Building Rm.222
Stanford, California 94305
Office: 650-723-7834
Cell: 310-689-9743
Email: yanyao at stanford.edu



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