question of LPCVD dopant concentration
yanyao at stanford.edu
Sat Apr 2 11:57:58 PDT 2011
I have a question about the concentration of doping gas in using
Thermocopoly 1 and 2. Understanding this clearly would enable me to
select the dopant flow rate correctly.
In the case of P620B2H6 recipe with B2H6 5 sccm, what would be SiH4
flow rate? Is SiH4 100% pure or diluted in Ar gas? Is B2H6 diluted is
Ar as well? If yes, what the ratio of dilution?
Thanks for help!
Yan Yao, Ph.D
Stanford Postdoc Scholar
476 Lomita Mall, McCullough Building Rm.222
Stanford, California 94305
Email: yanyao at stanford.edu
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