Durimide information

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Apr 22 11:35:19 PDT 2011

Hello Farid and Kaveh,
This is to let you know that your chemical has been okay to be used in 
the process that Kaveh had send me.
Please come and log your chemical in the binder in my office and get the 
appropriate labels.
I have already talked  to you about how to transfer it to the lab.

Here are the tools that will see the durimide:

Spinning: Headway

Etching 1: Drytek 4 or MRC

Ion Milling: Grandis

PECVD Oxide: STS Dep

Etching 2: Drytek 4

Removal: Drytek 4 w/ O2 plasma


On 4/14/2011 2:51 PM, Farid Zuberi wrote:
> Hello All,
> Me and Kaveh are planing to use Durimide in the future here in SNF. Please review attached MSDS for the material, our process flow will be mainly at Headway to apply resist, Bake, and planarize at Dry tech 4. Your prompt response will be greatly appreciated. Is that okay if we receive Durimide one liter bottle here SNF shipping address? if you guys have any questions or concerns please feel free to contact me or Kaveh.
> Thank You,
> Farid Zuberi =

More information about the specmat mailing list