Question on nickel etchant
Daesung Lee
daesung at stanford.edu
Thu Aug 25 15:49:28 PDT 2011
Hi Mary,
Thanks for the information. It's good to hear that there are two labmembers using the etchant. I'll first contact them about possibly borrowing or sharing and get used to using the etchant with precautions and instructions. I anticipate to use the etchant frequently if it turns out to be a good etchant I can rely on. If so, when I order a new bottle, I'll contact you about procedures to follow (standard personal chemical protocols)
Thanks.
Daesung
----- 원래 메시지 -----
보낸 사람: "Mary Tang" <mtang at stanford.edu>
받는 사람: "Daesung Lee" <daesung at stanford.edu>
참조: specmat at snf.stanford.edu, "Mahnaz Mansourpour" <mahnaz at stanford.edu>
보낸 시간: 2011년 8월 25일, 목요일 오후 12:45:24
제목: Re: Question on nickel etchant
Hi Daesung --
This has already been approved for use at wbgeneral and wbgaas. There
are two labmembers who have gallon bottles in the lab. Rather than
order a new bottle, I would suggest getting in contact with them about
possibly borrowing or sharing. The people who have this are Gavin Zhu
(Coral ID = tzhu) and Kaveh Milaninia (kavehm).
Make sure to read the MSDS. Used etchant and first rinses must be
collected locally, in labeled waste containers. Make sure to use
non-plastic, non-metal containers/beakers (glass or teflon are OK) for
holding the etchant and the waste (it's nitric acid-based which will
oxidize plastics and etch metals.)
If you are heating, make sure to review the station procedures for hot
plate use.
If you anticipate using a lot of it, then you might want to order your
own -- If you decide to get your own bottle, there are more procedures
to follow (standard personal chemical protocols) -- let us know if you
do so we can remind you.
Mary
On 8/25/2011 12:16 PM, Daesung Lee wrote:
> Hi Mary,
>
> I have a quick question. I have a need to use Nickel Etchant TFB in my process in SNF where nickel is used as a sacrificial layer. This etchant is shown to be a good etchant which does not etch most of materials that I want to protect: Oxide, Au, Cr
>
> Would you evaluate whether I can bring it with me to SNF? It would be really helpful for me to work with this etchant.
>
> Please see the attached MSDS and the link http://www.transene.com/ni_etchant.html
>
> Thanks.
> Daesung
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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