Indium Antimonide

Frank Chen fc3 at
Mon Jul 11 11:19:31 PDT 2011


I'm interested in using indium antimonide (InSb) wafers in a gold deposition tool like innotec. I was wondering if this material is allowed as a substrate. I won't be storing or disposing of the wafers inside the clean room. The MSDS is attached here. The only processing I need to do at the SNF is deposit a ~70nm Au layer. The wafers are from

Firebird Technologies Inc.
2950 Highway Drive
Trail, BC V1R 2T3

Phone: (250) 364-5605
Fax: (250) 364-5643

Please let me know if this is allowed. Thank you!

-Frank Chen (fc3)
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