Indium Antimonide

Frank Chen fc3 at stanford.edu
Mon Jul 11 11:19:31 PDT 2011


Hi,

I'm interested in using indium antimonide (InSb) wafers in a gold deposition tool like innotec. I was wondering if this material is allowed as a substrate. I won't be storing or disposing of the wafers inside the clean room. The MSDS is attached here. The only processing I need to do at the SNF is deposit a ~70nm Au layer. The wafers are from

Firebird Technologies Inc.
2950 Highway Drive
Trail, BC V1R 2T3
Canada

Phone: (250) 364-5605
Fax: (250) 364-5643

http://www.firebird.bc.ca/

Please let me know if this is allowed. Thank you!

-Frank Chen (fc3)
-------------- next part --------------
A non-text attachment was scrubbed...
Name: MSDS - InSb.pdf
Type: application/pdf
Size: 99054 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20110711/01eea46c/attachment.pdf>


More information about the specmat mailing list