Specmat request
Mary Tang
mtang at stanford.edu
Thu Jun 23 15:05:21 PDT 2011
Hi Alex --
This should be fine, provided the polymers are fully cured or hardened
(so they don't leave gunk on the tip.) Please contact Uli for training
if you haven't done so already -- she will review with you the policies
on what can and can't be measured on this system.
M
On 6/23/2011 2:59 PM, Alex Hsing wrote:
> Hello,
>
> Here is my specmat request:
>
> Alex Hsing (Coral login: hsing) phone: 310-560-6895
> PI: R.H. Dauskardt
>
> Materials: polyvinyl alcohol (PVA) and nylon films on Si wafers
>
> Vendor/manufacturer info: Applied Materials
>
> Reason for request: I would like to measure the film thickness on the Alphastep
>
> Process Flow: No processing will be done
>
> Storage: Will not be stored at SNF
>
> Disposal: Will not be disposed at SNF
>
> Thanks,
> Alex
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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