From srikantv at stanford.edu Mon Mar 14 15:36:36 2011 From: srikantv at stanford.edu (Srikant Vaithilingam) Date: Mon, 14 Mar 2011 15:36:36 -0700 Subject: Approval to bring 509 crystalbond stripper into SNF Message-ID: <00cf01cbe298$47018760$d5049620$@stanford.edu> Dear SpecMat Committee, I would like to request permission to bring the solvent '509-S stripper' into the SNF cleanroom. This is a solvent that dissolves Crystalbond 509 which is used to mount wafers temporarily onto a carrier wafer for use in such tools as STS2. Crystalbond 509 is already approved for use inside SNF on the recommendation of STS and following similar practices at the Univ. of Michigan, Ann Arbor and Georgia Tech. '509-S Stripper' is a non-hazardous, non-flammable solvent, and I hope there can be a quick approval to bring this solvent into SNF. I have answered all the questions posed on the SNF website for SpecMat approval below. Thank you, Sincerely, Srikant 1) Name: Srikant Vaithilingam Coral login: srikantv Phone: 650-723-0297 Email: srikantv at stanford.edu PI: Prof. Butrus T. Khuri-Yakub 2) Solvent Name: Crystalbond 509-S Stripper MSDS: attached to this email 3) Vendor: SPI Supplies Division / Structure Probe, Inc. 569 East Gay Street P.O. Box 656 West Chester, PA 19381-0656 USA Phone: 1-(800)-2424-SPI Toll-free from USA/Canada FAX: 1-(610)-436-5755 E-mail: spi3spi at 2spi.com WWW: www.2spi.com http://www.2spi.com/catalog/mounts/crystalbond-509s-stripper.shtml Manufacturer: Aremco Products, Inc. 707-B Executive Blvd. Valley Cottage, NY 10989 4) Reason for request: Using crystalbond to mount a wafer onto a carrier wafer is the recommended operating procedure for use in STS2. Many other laboratories use the same method including LNF (Univ. of Michigan, Ann Arbor) and Georgia Tech. http://ssel-front.eecs.umich.edu/ToolDocs/doc00105.pdf Using 509-S stripper to dissolve the crystalbond after use is the recommended method from the manufacturer of Crystalbond. It has many advantages over acetone including the following: "It features a very low evaporation rate, it rinses off easily with water, it is non-flammable, non-reactive with metals, and it is also biodegradable. But the most attractive part about the use of the stripper, relative to acetone, is that one need not be exposed to potentially harmful (acetone) vapors" 5) Process Flow: I will use the 509-S stripper only at WBsolvent to debond the carrier wafer from the etched wafer. 6) Amount and form: I will bring in 1 gallon (liquid) of the stripper in a plastic bottle similar in size and look to the current containers for acetone, methanol etc. It will be appropriately labeled with the chemical name, my name etc. 7) Storage: I would like to store the solvent inside SNF. Storage group 'L' or 'G' would be fine. 8) Disposal: I will dispose of the chemical in the same carboy as the other solvents at WBSolvent. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: msds_509-S_000.pdf Type: application/pdf Size: 134073 bytes Desc: not available URL: From mtang at stanford.edu Tue Mar 15 12:24:13 2011 From: mtang at stanford.edu (Mary Tang) Date: Tue, 15 Mar 2011 12:24:13 -0700 Subject: Approval to bring 509 crystalbond stripper into SNF In-Reply-To: <00cf01cbe298$47018760$d5049620$@stanford.edu> References: <00cf01cbe298$47018760$d5049620$@stanford.edu> Message-ID: <4D7FBCDD.7070805@stanford.edu> Hi Srikant -- Yes, CrystalBond 509 is approved for use at SNF, following standard procedures (grinding and mixing outside the lab, appropriate labeling and storage inside.) This is stripping chemical is very interesting. A couple of concerns though. It's true that this is a lot safer from a flammability standpoint, but I'm not sure it is so from a health perspective. The main ingredient has a TWA of 10 ppm whereas acetone is something like 500 ppm (although I grant that it's skin versus inhalation and I'm not sure this is comparing apples to apples) -- also the LD50 is higher for acetone (oral, rats). The other question is what "glycol ether" means. We've phased out glycol methyl ethers because the US semiconductor industry has banned them for health reasons (linked to reproductive problems), though Europe and Japan have not followed. Glycol ethyl ethers however, are OK, I believe -- or at least US semiconductor chemicals are now using these. Although CrystalBond 509 is approved in other labs, it would be interesting to know if the remover is also approved. Also, if it is possible to find out whether the glycol ethers used in the remover are the methyl or ethyl (or higher) variety. I'd be willing to go with limited use for evaluation purposes (time limit, no sharing, review of health risks and handling, etc.) but would not be willing to go so far as to support approval without more information. If you want to go with limited use, please talk with Mahnaz or me. Otherwise, more information would be needed. Thanks, Mary On 3/14/2011 3:36 PM, Srikant Vaithilingam wrote: > > Dear SpecMat Committee, > > I would like to request permission to bring the solvent '509-S > stripper' into the SNF cleanroom. > > This is a solvent that dissolves Crystalbond 509 which is used to > mount wafers temporarily onto a carrier wafer for use in such tools as > STS2. > > Crystalbond 509 is already approved for use inside SNF on the > recommendation of STS and following similar practices at the Univ. of > Michigan, Ann Arbor and Georgia Tech. > > '509-S Stripper' is a non-hazardous, non-flammable solvent, and I > hope there can be a quick approval to bring this solvent into SNF. > > I have answered all the questions posed on the SNF website for SpecMat > approval below. > > Thank you, > > Sincerely, > > Srikant > > 1)Name: Srikant Vaithilingam > > Coral login: srikantv > > Phone: 650-723-0297 > > Email: srikantv at stanford.edu > > PI: Prof. Butrus T. Khuri-Yakub > > 2)Solvent Name: Crystalbond 509-S Stripper > > MSDS: attached to this email > > 3)Vendor: SPI Supplies Division / Structure Probe, Inc. > > 569 East Gay Street > > P.O. Box 656 > > West Chester, PA 19381-0656 USA > > *Phone:* 1-(800)-2424-SPI Toll-free from USA/Canada > > *FAX:* 1-(610)-436-5755 > > *E-mail:* spi3spi at 2spi.com > > > *WWW:* www.2spi.com > > http://www.2spi.com/catalog/mounts/crystalbond-509s-stripper.shtml > > Manufacturer: Aremco Products, Inc. > > 707-B Executive Blvd. > > Valley Cottage, NY 10989 > > 4)Reason for request: > > Using crystalbond to mount a wafer onto a carrier wafer is the > recommended operating procedure for use in STS2. Many other > laboratories use the same method including LNF (Univ. of Michigan, Ann > Arbor) and Georgia Tech. > > http://ssel-front.eecs.umich.edu/ToolDocs/doc00105.pdf > > Using 509-S stripper to dissolve the crystalbond after > use is the recommended method from the manufacturer of Crystalbond. It > has many advantages over acetone including the following: > > "It features a very low evaporation rate, it rinses off easily with > water, it is non-flammable, non-reactive with metals, and it is also > biodegradable...But the most attractive part about the use of the > stripper, relative to acetone, is that one need not be exposed to > potentially harmful (acetone) vapors" > > 5)Process Flow: > > I will use the 509-S stripper only at WBsolvent to debond the carrier > wafer from the etched wafer. > > 6)Amount and form: > > I will bring in 1 gallon (liquid) of the stripper in a plastic bottle > similar in size and look to the current containers for acetone, > methanol etc. It will be appropriately labeled with the chemical > name, my name etc. > > 7)Storage: > > I would like to store the solvent inside SNF. Storage group 'L' or > 'G' would be fine. > > 8)Disposal: > > I will dispose of the chemical in the same carboy as the other > solvents at WBSolvent. > -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From dgmoore at stanford.edu Fri Mar 25 14:15:54 2011 From: dgmoore at stanford.edu (David Moore) Date: Fri, 25 Mar 2011 14:15:54 -0700 (PDT) Subject: Alumina Slurries on the Buehler Polisher/Grinder In-Reply-To: <2123374085.264928.1301087605767.JavaMail.root@zm03.stanford.edu> Message-ID: <1199287316.265007.1301087754342.JavaMail.root@zm03.stanford.edu> Hello, I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw. I'd like to use the following consumables (purchased myself) on it: Buehler Microcloth Buehler 1.0 Micron Alumina Slurry Buehler 0.3 Micron Alumina Slurry Buehler 0.05 Micron Alumina Slurry Here is a link to Buehler's catalog if you're interested in looking: http://www.buehler.com/productinfo/2011CBG/Grinding_Polishing_pg24-46.pdf I'd like to use this to polish a copper layer embedded in polyimide (HD Microsystems 2611). Thanks, David Moore From edmyers at stanford.edu Fri Mar 25 14:20:29 2011 From: edmyers at stanford.edu (Ed Myers) Date: Fri, 25 Mar 2011 14:20:29 -0700 Subject: Alumina Slurries on the Buehler Polisher/Grinder In-Reply-To: <1199287316.265007.1301087754342.JavaMail.root@zm03.stanfor d.edu> References: <2123374085.264928.1301087605767.JavaMail.root@zm03.stanford.edu> <1199287316.265007.1301087754342.JavaMail.root@zm03.stanford.edu> Message-ID: <6.2.5.6.2.20110325141923.058311d0@stanford.edu> David, These materials match the design of the Buehler systems. You will need to capture the waste and make sure it has the appropriately filled out waste tag. Ed At 02:15 PM 3/25/2011, David Moore wrote: >Hello, > >I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw. > >I'd like to use the following consumables (purchased myself) on it: >Buehler Microcloth >Buehler 1.0 Micron Alumina Slurry >Buehler 0.3 Micron Alumina Slurry >Buehler 0.05 Micron Alumina Slurry > >Here is a link to Buehler's catalog if you're interested in looking: >http://www.buehler.com/productinfo/2011CBG/Grinding_Polishing_pg24-46.pdf > >I'd like to use this to polish a copper layer embedded in polyimide >(HD Microsystems 2611). > >Thanks, >David Moore