Alumina Slurries on the Buehler Polisher/Grinder

David Moore dgmoore at stanford.edu
Fri Mar 25 14:15:54 PDT 2011


Hello,

I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw. 

I'd like to use the following consumables (purchased myself) on it:
Buehler Microcloth 
Buehler 1.0 Micron Alumina Slurry
Buehler 0.3 Micron Alumina Slurry
Buehler 0.05 Micron Alumina Slurry

Here is a link to Buehler's catalog if you're interested in looking:
http://www.buehler.com/productinfo/2011CBG/Grinding_Polishing_pg24-46.pdf

I'd like to use this to polish a copper layer embedded in polyimide (HD Microsystems 2611).

Thanks,
David Moore



More information about the specmat mailing list