Alumina Slurries on the Buehler Polisher/Grinder

Ed Myers edmyers at stanford.edu
Fri Mar 25 14:20:29 PDT 2011


David,

These materials match the design of the Buehler systems.  You will 
need to capture the waste and make sure it has the appropriately 
filled out waste tag.

Ed

At 02:15 PM 3/25/2011, David Moore wrote:
>Hello,
>
>I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw.
>
>I'd like to use the following consumables (purchased myself) on it:
>Buehler Microcloth
>Buehler 1.0 Micron Alumina Slurry
>Buehler 0.3 Micron Alumina Slurry
>Buehler 0.05 Micron Alumina Slurry
>
>Here is a link to Buehler's catalog if you're interested in looking:
>http://www.buehler.com/productinfo/2011CBG/Grinding_Polishing_pg24-46.pdf
>
>I'd like to use this to polish a copper layer embedded in polyimide 
>(HD Microsystems 2611).
>
>Thanks,
>David Moore





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