Alumina Slurries on the Buehler Polisher/Grinder
edmyers at stanford.edu
Fri Mar 25 14:20:29 PDT 2011
These materials match the design of the Buehler systems. You will
need to capture the waste and make sure it has the appropriately
filled out waste tag.
At 02:15 PM 3/25/2011, David Moore wrote:
>I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw.
>I'd like to use the following consumables (purchased myself) on it:
>Buehler 1.0 Micron Alumina Slurry
>Buehler 0.3 Micron Alumina Slurry
>Buehler 0.05 Micron Alumina Slurry
>Here is a link to Buehler's catalog if you're interested in looking:
>I'd like to use this to polish a copper layer embedded in polyimide
>(HD Microsystems 2611).
More information about the specmat