Alumina Slurries on the Buehler Polisher/Grinder

[Ed Myers]

David,

These materials match the design of the Buehler systems.  You will 
need to capture the waste and make sure it has the appropriately 
filled out waste tag.

Ed

At 02:15 PM 3/25/2011, David Moore wrote:
>Hello,
>
>I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw.
>
>I'd like to use the following consumables (purchased myself) on it:
>Buehler Microcloth
>Buehler 1.0 Micron Alumina Slurry
>Buehler 0.3 Micron Alumina Slurry
>Buehler 0.05 Micron Alumina Slurry
>
>Here is a link to Buehler's catalog if you're interested in looking:
>http://www.buehler.com/productinfo/2011CBG/Grinding_Polishing_pg24-46.pdf
>
>I'd like to use this to polish a copper layer embedded in polyimide 
>(HD Microsystems 2611).
>
>Thanks,
>David Moore